Thermo-chiller

6 !2 x 4 !3 w Parts List (170) No.

Electric Actuators

24 66 to 400 104 110 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 106 112 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 104 110 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 106 112 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 108 114 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

Angular Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

VXP21/22/23

VXP2130: Option C, K, Q, S only. Solenoid Specifications Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 4.5 45 3.2 35 6 55 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Note) The return voltage is 20% or more of the rated voltage for AC and 2% or more for DC. The allowable voltage fluctuation rate is 10% of the rated voltage value for both AC and DC.

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

EXxx-OMN0037CN

LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-AM B M12 (5 )4 2 2 M12 (4 ) No. 1 LED 2 () 3 () 4 5 6 () -33No.EX-OMN0037CN-A 1 24 V() 24 V() 2 + 3 0 V() 0 V() 4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC 2 2 A/D DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1 k 600 IP67 -34No.EX-OMN0037CN-A

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor Symbol Specifications DC (1.0 W) (3) AC VS Nil Standard type High pressure type (Metal seal only) B C A (1.0 W) K (1) C A B VFN (0.5 W) Low wattage type Y YZ: DIN terminal YOS: DIN terminal Without connector YS: DIN terminal Y: DIN terminal YO: DIN terminal Without connector External pilot type

PSxx-OML0002CN

/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 1 -33No.PS-OML0002CN-G [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -34No.PS-OML0002CN-G [F 7] 30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1 5

MU

6 !7 !

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

x P (Rc, NPT, G) NA AL F Width across flats B1 H1 2 x NN Standard port Relief port M5 x 0.8 H2 I Relief port D C B 4 x LD LH MM 2 x 4 3.2 N X Y N X Y S + Stroke LX LS + Stroke Z LZ ZZ + Stroke (mm) AL LH LS LZ MM G NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S: Upper space 90, Lower space 180 6 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 TF effective depth TL Sizes 20, 30, 40 TA TB 45 BE CA CA BU 8-JJ (opposite side 4 places) 2-J through (opposite side JA counter bore depth JB) BD B With double shaft DD W D I K Auto switches b (10) Max. 2-Rc1/8 (port size) H F (US) M (UW) CB Q BC N BB BA BA G D A (AU) Max S L TF effective depth

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(1) Low wattage type Y B C A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section 0.34mm2 (M5) 45.5 50.5 1 P VQ (20) 13 R1 R2 5 3 (11) VQ4 8.5 PE port 16.5 16.5 2-Rc(PT)1/8 P(SUP)port 4-Rc(PT)1/8 R1,R2(EXH) port VQZ (23.5) 47 VQD DIN connector

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Electric Actuator with Integrated Guide Series LTF

30 LTF8FNH-K to 500 to 440 to 350 to 290 to 240 Features 2 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.