ZSE F/ISE Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G
V 300 50 6 0.4 V ()30 msec. 7 8 3/min) L/mincfm(ft 9 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [0]) (-99 [0]) (-1919 [0]) 0999,999,999 L 1 L/min 10 L LCD 2 () 4 7 6 11 ON (OUT1/OUT2 IP65 AC250 V 1 2 M (DC50 V ) 050 -1060 () 3585RH() CEULCSARoHS Rc1/2NPT1/2G1/2 Rc3/4NPT3/4G3/4 SUS304PPSHNBRSiAuGE4F Rc NPT 160 g 240 g G 170 g 245 g +80 g +25 g +
G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15
CE marked CE marked Standard (EMC directive / RoHS directive), (EMC directive / RoHS directive) UL (CSA) Weight 170 g 175 g 170 g 1: All unused connectors must have a seal cap fitted. -32No.EX-OMX1011 Dimensions 26 EX600-ED2 EX600-ED2-2 26 -33No.EX-OMX1011 EX600-ED2-3 -34No.EX-OMX1011 EX600-ED3 EX600-ED3-2 -35No.EX-OMX1011 EX600-ED3-3 -36No.EX-OMX1011 EX600-ED4/ED5 26 EX600-ED4/ED5-2 26 -
3m 0.5m D-A7l, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.
Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.
34 g (Without sub-plate), 42 g (With sub-plate) Rated voltage 12, 24 VDC Note 5) Allowable voltage fluctuation 10% of rated voltage Body ported type (Tubing type) Type of coil insulation Class B 2.5 W at inrush, 1 W at holding (with builtin power saving circuit) 1.5 W Power consumption Note 6) 50 dB Coil switching noise Note 1) Select an appropriate material for the wetted part when fluid
Piping specifications Additional weight of 1 station g 5 station weight g Note 1) Port size Series Applicable solenoid valve Type of connection Applicable Base type stations P, R A, B Piping Port size C3 (for 3.2) C8 (for 8) C4 (for 4) Side SQ1000 C6 (for 6) J kit: Flat cable 1 to 8 stations SQ130 SQ131 420 20 Option SS5Q13Note 2) L3 (for 3.2) Built-in silencer Direct exhaust L4 (for 4) Top
34 g (Without sub-plate), 42 g (With sub-plate) Rated voltage 12, 24 VDC Note 5) Allowable voltage fluctuation 10% of rated voltage Body ported type (Tubing type) Type of coil insulation Class B 2.5 W at inrush, 1 W at holding (with builtin power saving circuit) 1.5 W Power consumption Note 6) 50 dB Coil switching noise Note 1) Select an appropriate material for the wetted part when fluid
TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100
A HAA HAW E B AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E
Lock Specifications Clamp Specifications Locking action Spring locking (Exhaust locking) Without shim With shim Clamp stroke 10 mm 0 0.5 Unlocking pressure 0.2 MPa or more 10 mm to 12 mm Lock starting pressure 1 pc.
Basic Specifications Voltage 12 to 24 VDC 12 to 24 VDC No. of outputs for switch 2 outputs 5 outputs Analog output 1 to 5 V 4 to 20 mA Operating temperature 0 to 50C 0 to 50C Number of screens 3 3 Functions Front face: IP65 Others: IP40 Enclosure IP65 IP40 3 Step Yes Yes Wiring Connector Connector Compact Pneumatic Pressure Sensor PSE53m Compact Pneumatic Pressure Sensor PSE54m Low Differential
How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.
(OUT1) Black Main switch circuit Load Connector DC polarity indication 30V, 80mA (OUT2) + White _ 12 to 24VDC Load 30V, 80mA Lever Hysteresis setting trimmer Blue DC () Pressure setting trimmer Pin Slot ZSE1-18,-19 HYS Indicator light SET Brown DC (+) Housing (OUT1) Main switch circuit Black Load 30V,80mA + Analog output 12 to 24VDC Load White Blue DC () 2.
XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10
J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air
IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)
IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)
How to Order G LG1 05 1 Cable length 05 5m Compatible models G R Y Matsushita Electric Industrial Co., LTD Mitsubishi Electric Corporation Yaskawa Electric Corporation Cable compatibility table Model Manufacturer's No.