SMC Corporation of America
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Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard

W : Mass (kg) F : Load (N) FE : Load equivalent to impact (when stopper collides) (N) a : Average speed (mm/s) M : Static moment (Nm) : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) At impact: = 1.4 a 1.4 100 = 1.4 a (mm/s) FE = agW Note 4) ME = FEL1 = 0.05 agWL1 (Nm) 1 3 Note 4) Average load coefficient

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

X Olhr specificalions are lhe same as lor $andard lype. r.rc"rel raiGtin=sl IFFFEI--IF]@]xes There is no stick-slip phenomenon at a low-speed drive of 10-50mm/s, (0.2 2 in/s), and all strokes drive at a constant speed smoothly.

X Olhr specificalions are lhe same as lor $andard lype. r.rc"rel raiGtin=sl IFFFEI--IF]@]xes There is no stick-slip phenomenon at a low-speed drive of 10-50mm/s, (0.2 2 in/s), and all strokes drive at a constant speed smoothly.

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -38- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

Dust removal Dust collection Blow nozzle with improved dust removal efficiency IZH A4 size [ZVB20] 210 x 297 mm (Dimensions) 202 x 212 mm (Static neutralization space) A3 size [ZVB40] 400 x 384 mm (Dimensions) 392 x 298 mm (Static neutralization space) Lamp cover Smartphone c e s e i o p f k v r o a w r i Cosmetic case o Lens s u t s r o s p i p z e u s S .

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

# 0 0 P R [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. ):0,1,2,3,4 30 - # 0 0 F R [CR] No. # 0 0 F R [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. 31 - # 0 0 S R [CR] No. # 0 0 S R [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. )1 (0.1 )0 32 - # 0 0 O R [CR] No. # 0 0 O R [CR] No. 0

220239 ID1 240249 250253 254,255 / JOG(-) ON OFF FLGTH ON JOG(-) /INP OUT0~5 OFF/ INP OUT0~5 ON JOG(+) + FLGTH JOG(-) JOG(+)/ ON ON OFF 43 - / JOG *1 /(mm/s) 2) JOG *1 /( mm/ s 2) JOG *1 /( mm/ s JOG *1 /() 1 (mm) *1 PLC 8,16,32 8 8 )100%GW [OUT Data]Address.1620mm/sAddress.17 20mm/s 16 14h 10%100%1016 0Ah PLC 16 16 )100mm/s GW [OUT Data]Address.4-Address.5 Address

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec. -18No.PF-OMP0001CN-F PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical ently: L/ M plug connector only.

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

(page 72) Y U16 0x0064 5 R/W (100) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing

2 JOG 1mm/s 2 JOG 1mm/s JOG 1% () 0.01mm 37 - Bit/Byte / ID No. 0 1 Bit[70] 1 RWwn 1) 063 1ABS() Bit[F8] 1 2) 2INC() Bit[70] H RWwn+1 1) 2 065500 mm/s Bit[F8] L Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8]