Thermo-chiller/Rack Mount Type

Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting (For Air-cooled Refrigeration) p. 37 HRR050

CP95

20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71

CP95

20 10 145 12 15 160 28 55 9 75 52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220

Sensor Monitor

(Refer to the "List of output modes" on page 36) Normal output O Operation light A light that turns on when the switch output is ON. The resistance value of a component between the voltage output element and the analog voltage output.

CXT

9.5 13.5 10.5 13 32.5 36 14.5 18.5 10.5 13 32.5 36 6.5 9 32.5 36 13.5 17.5 Bore size (mm) Long stroke 32 40 10 13.5 18 24 32.5 36 14 17.5 22 28 32.5 36 15 18.5 23 29 32.5 36 10 13.5 18 24 32.5 36 Bore size (mm) 3.8-12 Platform Cylinder Series CXT @ HS Reed switch Solid state switch A B D-F9NWV D-F9PWV D-F9BWV D-A90V D-A93V D-A96V D-F9NV D-F9PV D-F9BV 12 CL @ HS A B MLGC 16, 20, 25 CNA CB

Rotary Clamp Cylinders

20 53.5 9 67 14 18 6 15 to 25 M8 x 1.25 6.2 43 18 45 36 20 61 9 67 14 18 6 M10 x 1.5 8.2 53 23 65 46 22 77 11.5 88 18 22 8 30 to 40 M10 x 1.5 8.2 52.5 23 65 46 22 76.5 11.5 88 18 22 8 8 Rotary Clamp Cylinder: Heavy Duty Type 20, 25, 32, 40, 50, 63 Series MK2 See MK-Z How to Order MK2 10 R 20 B F M9BW Rotary clamp cylinder Heavy duty type Number of auto switches Nil S 2 pcs. 1 pc.

Plate Cylinder

I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 25 32 40 50, 63 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 25 32 40 50, 63 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 8 10 10 14 NX NZ R1 U1 NO NDH10 NL NL NO NX R1 U1 Part no. Applicable pin Part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

88.5 36 48 88.5 88.5 36 48 26.5 88.5 36 52 84.5 32 23 84.5 32 32.5 30 30 30 30 36.5 102.5 36.5 36.5 48.5 102.5 36.5 48.5 102.5 98.5 32.5 28 28 102.5 98.5 52.5 40 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

58

133 110 17 34.5 34 3/4 80 106 45 36 M36 x 1.5 1/ 5 stroke 306 342 75 40 141 327 363 120 The minimum stroke with rod boot is 30 mm or more.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Dimensions/LTF8PH (2 x n1) x 6.6, Drill through 13, counter bore depth 6 thread depth 9 80 4 x M6 x 1 46 Sensor cable Sensor cable fixing clip Stroke + 96 (Table movement range) (25.5) 60 106.5 56 21.5 A 61.5 45 A 21.5 31.5 76.6 88.2 81 Stroke + 135 Stroke + 228 Upper: Incremental encoder Lower: Absolute encoder 50 12 40 5 Dog fitting for switch Work piece mounting reference plane 19 36

Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11

CE

UP 10-12-36 36 Counter CEU FUNC. FUNC. DOWN SEL. key 3-3 Stop output The setting mode for stand-by time until stop output is commanded is selected by pressing the SEL key while STOP is flashing. Set numerical values with the direction keys. The unit is 0.1 sec. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting.

CRQ2

(Example) For M4: L2 = 8 mm Applicable shaft types: J, Z D1 = C1 = C Y = L2 = C2 C1 L2 + (3 x P) Q2 = M C2 = C L1 = L2 = X = D2 = (mm) (mm) L1 max X 2 X 2 X 2.5 X 3 X 3 X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 D2 3.5 to 4.9 3.5 to 5.9 5 to 9.9 5 to 11.9 5 to 14.9 Y 1 to 18 1 to 20 1 to 30 1 to 32 1 to 36 D1 3.5 to 4.9 3.5 to 5.9 5 to 9.9 5 to 11.9 5 to 14.9

CE

UP 10-12-36 36 Counter CEU FUNC. FUNC. DOWN SEL. key 3-3 Stop output The setting mode for stand-by time until stop output is commanded is selected by pressing the SEL key while STOP is flashing. Set numerical values with the direction keys. The unit is 0.1 sec. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting.

CJ2

Calculation: (Example) CJ2RKA10-45 Basic weight 36 (10) Additional weight 4/15 stroke Cylinder stroke 45 stroke 36 + 4/15 x 45 = 48 g Allowable rotational torque (Nm) 10 16 0.02 0.04 Operate the cylinder in such a way that the load to the piston rod is always applied in the axial direction.

CXS

36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

ITV

L-bracket Description ITV20ll ITV30ll Flat bracket 100 P3020114 25 15 L-bracket INI-398-0-6 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 36 7 m36 84 4-5.5 4-7 36 7 70 60 20 12 4-5.5 1.6 1.12-2 Electro-Pneumatic Regulator Series ITV2000/3000 Working Principles When the input signal rises, the air supply solenoid valve (1) turns ON, and the exhaust solenoid valve (2) turns OFF.

MK

11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.

CE

23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2-M5 x 0.8 (Port size) 4-M5 x 0.8 Thread depth 10 74 20 114 + Stroke 31 145 + Stroke 2 10-12-14 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: 4-5.5 CEP1L20 Stroke (Positioning pin hole) 40 6 13.5 25 6 +0.05 +0.02 4 RE A B REC 68 85 CX CY MQQ M RHC MK(2) 22.5 RS Q G 4.5 57.5 RS H A 40 36 RZQ 52 MI W S CEP1 CE1

VQ5000

Note3) When specifying more than one option, enter symbols in alphabetical order. 3m 11 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (D Sub Connector Kit) F Applicable connector: D sub connector (25 pin) (conforms to MIL-C-24308) 83 29.5 29.5 2-Rc1/8 (pilot EXH. port) 12 21 47.5 36 5 R1 PE 3 R2 1 P SMC 6-Rc3/4 Ports P(SUP), R(EXH) 179 106 9 9 59.2 46.8 With connector on