Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

(PNP) 5 V, 12 V IC Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet 12 V 5 V, 12 V Relay, PLC Diagnostic indication (2-color) 24 V IC 12 V 2-wire Water resistant (2-color) Grommet IC 5 V, 12 V With diagnostic output (2-color) 4-wire (NPN) Latch with diagnostic output (2-color) F7LF 2-wire P5DW Magnetic field resistant (2

IDX-OM-Z004

-) 0 4.2 IDF100150F-W 4 9 IDX-OM-Z004 5 5 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 1 5.2 5.2 5.2 10% 5.2 IDF100150F-W 5.1 5 1 IDX-OM-Z004 5 1 10% 3 () 1 2 IN OUT INOUT () 424 IDF100150F-W 5.1 5 2 IDX-OM-Z004 5 5.2 1-3 51 3.6 OFF () ON OFF ON IDF100150F-W 5.2 5 3 IDX-OM-Z004 5 5.3 R () OFF OFF OFF ON ON IDF100150F-W 5.3 R 5 4 IDX-OM-Z004 6 6.1 IDF100F-30-W IDF125F

Compact Cylinder with Air Cushion and Lock Series RLQ

F9NV F9PV F9BV F9NWV F9PWV F9BWV A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F Yes 100 V Relay PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color display) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Solid state switch Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Diagnostic

180

-wire(NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) M9BAV M9BA 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of order.

CLQ

) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double

Clean Air Module

Nil Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

EX510-GPR1.eng

INPUT COM D COM C COM B COM A Settings 2 4 Mounted by screw 54 5 16 70 5 PWR (V) Put Claw 1 of the body under DIN rail and push it upward.

Suction Guard (Produced upon receipt of order) FHG Series

(4D-P34) KA00733 (4D-P60) 04 to 08 AL-180H-V AL-183H-V AL-162H-V FKM or EPDM Element opening 10 to 16 AL-181H-V AL-184H-V AL-163H-V Band Element w 20 to 24 AL-182H-V AL-185H-V AL-164H-V Case Note 1) The material of seals (AL-162H-V to AL-164H-V and AL-180H-V to AL182H-V) is EPDM.

Smooth Cylinder Series CQSY

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Multistage Ejector (N)ZL Series

10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Transfer

(2-color indicator) 2-wire 12 V 24 V Grommet Yes Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 2-wire 12 V 3-wire (NPN equivalent) Reed auto switch Z76 IC circuit 5 V Yes Grommet 100 V Z73 IC circuit Relay, PLC 24 V 12 V 2-wire Z80 100 V or less Lead wire length symbols: 0.5 m Nil (Example) Y7BW 3 m L (Example) Y7BWL 5 m Z (Example) Y7BWZ Solid state auto switches marked

IDX-OM-V020

. 7-5 Chapter 8 Option A . 8-1 8.1 SAFETY INSTRUCTIONS FOR USE . 8-1 8.2 SPECIFICATIONS . 8-1 8.3 AIR PIPING . 8-1 8.4 AIR FLOW CAPACITY . 8-1 8.5 AIR/ REFRIGERANT CIRCUIT . 8-2 Chapter 9 Option C . 9-1 9.1 SPECIFICATIONS . 9-1 9.2 PRECAUTIONS FOR INSTALLATION AND HANDLING . 9-1 Chapter 10 Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

HRX-OM-W060

5-9 Current circulating fluid temperature [PV] . 5-10 Circulating fluid set temperature [SP] . 5-10 Circulating fluid discharge pressure [Press PV] . 5-11 Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Independent pump operation [Pump] . 5-12 Operation mode [MODE] . 5-12 RUN/STOP display . 5-12 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status