Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: L-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

ATX-OM-F003E

Outer dimensions and descriptions of each part 6 5. Installation 9 6. Cautions 10 7. Maintenance 11 8.

Precision Regulator

Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

Precision Regulator

Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Clean Regulator

Turn the cover clockwise (approximately 6 to 7 mm) and make sure that the matching mark on the cover is aligned with the groove on the top of the case. 3%F.S.

tTV2000/3000

.:..aiu.lu:.it:rit spqtrcatrons iet pressure max. 0.1MPa 1 a o iet Dressure max. 0.5MPa o a o iet oressure max. 0.9MPa a o )onnection Rc(Pfl 1/4 02 o o o E EE .ti'6 u, at CL ]onnection Rc(PT) 3/8 03 o o )onnection Rc(PT) 12 04 o Bracket B o o Bracket o o @ L-bracket Connection NPTl/4 N02 a o Connection NPT3/8 N03 a o o tr 6 . 9 o u t = ^ O v o EL o Connection NPTl/2 N04 o Connection G(PD

3M/SMseries

5-24VDC 6-12VDC 9-Others How to Order Pilot Valve Assembly SF4 50 SDcifictions Applicable plug connctor assembly for L&M type plug connector Connector assembly: DXT1 70-80'lA-r( Connector assembly with coven DXT170-12FA-* Voltage Manualoverride 1'100vAc 5q,50 Hz 2.

I

5-24VDC 6-12VDC 9-Others How to Order Pilot Valve Assembly SF4 50 SDcifictions Applicable plug connctor assembly for L&M type plug connector Connector assembly: DXT1 70-80'lA-r( Connector assembly with coven DXT170-12FA-* Voltage Manualoverride 1'100vAc 5q,50 Hz 2.

Air Cylinder NCM Series Stainless Steel Cylinders

D-864 Bone Sizes Rod Boot o75 -%', 088 -',6' 106 -1%6" 125 -114" 't50 -1%' J -Nylon K -Neoprene Astuation -Double Acting S -Spring Return T -Spring Extend srror,.rrn"r, Sirokg/Hundrlh ol an lnch Cushion' C -Rubber Bumper Note: Min. Strokes for Auto Switch Cylinders page 5. *Rubber Bumpers are no additional cost on 7s" & 174" bore size cylinderg. Thy are options on the other bore sizes.

Flame Resistant

For Flow Control Equipment Precautions, refer to Handling Precautions for SMC Products and the Operation Manual on the SMC website, http://www.smcworld.com Tubing O.D. 6, 8, 10 6 8, 10 8 10, 12 10 12 C values: Sonic conductance dm3/(sbar) Free flow 0.6 1.1 1.2 1.6 2.2 4.2 4.4 Controlled flow 0.7 1.1 1.3 2.2 2.6 4.4 4.8 Free flow 0.2 0.3 0.3 0.2 0.2 0.3 0.3 b values: Critical pressure ratio

PF3A8xxH.eng

PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D 4 : For more information about the options, refer to our website (URL https://www.smcworld.com). Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

AFJ20 to AFJ40

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size Option a Mounting Nil Without mounting option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Quick Exhaust Valve Series AQ

Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

E-ITV-STD-RF-A

Press Skey Set t he m axi m um pressure by usi ng t he and keys. ( di spl ayed al t ernat el y) *Adj ust i ng range: Ref er t o not e 1 t o 6 G o t o no.

Related Products: Motor Operated Auto Drain Series ADM200

Material Chrome treated Chrome treated Note Material 812PG-voltage Operating time 201324 (Nil) 201325 (4) 201326 (6) 201327 (8) No. No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC