Basic Type/Direct Mount Type

0 !5 !6 @4 !1 !4 !2 r i q @5 o u y t #0 @0 @8 !9 @2 @3 @7 18b @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators GC GA NN MM Piping port 3 x M5 x 0.8 9 CA F A T NB 0 80.3 0 BA0.3 Z + Stroke S + Stroke NA H 10, 16 NDh8 Mounting nut Y Section Y detail GB GC GA Relief port M5 x 0.8 Rod end nut NN Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 CA CB MM D BA 0 0.3 BB 0 0.3 BA 0 0.3 BB 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F

ZP

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.

HEC_W-E

When 0 is set, the alarm doesnt arise. T i m e M O D E < 1 0 m i n 10.

MB1

+0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 12.5 16.5 23.5 23.5 Bracket Combinations Bracket combination table -

Vacuum Unit

0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 20 40 60 80 Supply pressure [MPa] Suction flow [L/min (ANR)] ZK215

C85

42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

.0 100 0 105 100 100 105 105 Functions Sub screen setting function The display of the sub screen can be selected.

HRX-OM-R005

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060

10

Piston rod Thread dimensions (mm) M6 x 0.75 M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 5.3 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 7.1 9.1 12.7 18.7 25.7 Thread prepared hole dia. (mm) Nut tightening torque (Nm) 0.85 1.67 3.14 10.8 23.5 62.8 Do not damage. 2.

I

Frequency 4Hz Pressure Unit kPa psi MPa kgf/cm2 bar Preset Pressure Range 0~975 0~142 0~0.98 0~9.9 0~9.8 CIRCUIT AND E L E C T R I C A L CONNECTION S E T T I N G INSTRUCTIONS H O W T O P R E S E T P R E S S U R E S W I T C H: K e e p p re s s i n g t h e p u s h b u t t o n ( 1 ) S E T a n d tur n the pressure set trimmer (3) P.SET and f i g u r e s a r e s h o w n o n t h e p r e s s u

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

S R S J I H Stroke ZPR20F10-0-A14 20 3 +10 0 ZPR25F10-0-A14 30 +7 12.8 24.3 15.2 26.2 +20 ZPR32F10-0-A14 50 +25 +52 +40 13-11-115 20 Series ZPR 40 50 J K ZPR F 0-0-A14 (With buffer) S S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

Possible to transfer a workpiece at low-speed.

0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

Process Pump

0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate

MRHQ

-0.062 37h9 +2.2 0 15.2 opened MHS 0 -0.1 4 31 4-M2.5 x 0.45 (attachment mounting screw ) 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 Finger closing port MHC 3 Max. 6.1 MHT 5.7 13.7 12 4-M4 x 0.7 depth 6 MHY (two on the other side) 34 M5 x 0.8 Finger opening port 22.5 2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2

OMR0032

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.