CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16

Thermo-chiller/Rack Mount Type

The weight will increase by 2 kg when Option T1 (Inverter pump mounted) is selected. 12 Option M (Applicable to DI water piping) does not contain copper. 13 For Option DM (With electric conductivity control function, Applicable to DI water piping) 14 If the product is used at an altitude of 1000 m or higher, refer to For altitudes of 1000 m or higher on page 42. 15 No continuous voltage

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Type K3 ZR1-VK3M Pilot air Circuit diagram Pilot air PS PE Air operated b Air operated a PV PD Release valve Supply valve V Pilot valve for release valve Pilot valve for vacuum switching valve Manual override Dimensions not indicated are identical to type K2. 13-3-42 42 Series ZR Large Size Vacuum Module: Vacuum

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/4, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion

Function: 2 Position Single, Body Option: Class 3, Piping: Side, Port Size: 1/4, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 2 Position Single, Body Option: Class 2, Piping: Side, Port Size: 1/4, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 2 Position Double, Body Option: Class 2, Piping: Side, Port Size: 1/4, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 2 Position Double, Body Option: Class 3, Piping: Side, Port Size: 1/4, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 3 Position Closed Center, Body Option: Class 2, Piping: Side, Port Size: 1/4, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 3 Position Exhaust Center, Body Option: Class 3, Piping: Side, Port Size: 1/4, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Environment

30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 60 LEJ Lead 3: LEY25C 50 20 LEL Lead 6: LEY25B 40 Lead 6: LEY25B 15 30 LEM 10 20 18 Lead 12: LEY25A 7 LEY LEY 12 10 Lead 12: LEY25A 0 0 LES 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEPY LEPS LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 LER 90 50 80 Lead 4: LEY32C LEH 40 42

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric

Title not found

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42