2/3 Port Valve for Various

LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

Compact and

Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum pressure Vacuum pressure Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 40 40 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 60 Vacuum pressure Vacuum pressure 40 60 60 30 30 Air consumption

20

Material Applicable blow gun model Model Male thread nozzle 1 to 2.5 Male thread nozzle 3 to 4 Width across flats 17 Nozzle type P5670129-01 P5670129-01F P5670129-02 P5670129-02F HNBR Fluororubber HNBR Fluororubber VMG1mm-m-01 to 04 VMG1mm-m-05 to 07 m25 VMG1m-mm-1 to 04 Width across flats 17 m23.5 VMG1m-mm-05 to 07 Cover for copper extension nozzle (mm) Nozzle cover part no.

LVQ

B A Inch sizes 03 05 07 11 13 19 25 N.C. 1/8 3/16 1/4 3/8 1/2 3/4 1 Double acting With bypass PA PA N.C. PB B A B A Double acting N.C. Double acting N.C. With flow rate adjustment & bypass PA Basic size With reducer N.C. B A N.C. With indicator PA N.C. B A N.C. With indicator & bypass PA N.C.

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM

HRX-OM-I051

(Only for HRZ010-W*S) 0, 15 to 40 LPM 0, 4 to 10.6 GPM 6 LOW FLOW 0, 8 to 40 LPM 0, 2.1 to 10.6 GPM (Only for HRZ010-W*S) 7 FLOW UNIT LPM, GPM Allows the selection of the unit of flow rate. 8 PRESS UNIT MPa, PSI Allows the selection of the unit of pressure. 9 SLAVE ADRS. 1 to 16CH Allows the selection of the slave address for serial RS-485 communication.

ZU

40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction flow.

PC Wiring System

PLC I/O card (KZ-C32X, KZ-C32T) Dimensions Series PCW-02 With power lines Without power lines PLC connection side PCW unit connection side PLC connection side PCW unit connection side Reduced-wiring Fieldbus System FCN manufactured by FUJITSU LIMITED 40 pin connector FCN manufactured by FUJITSU LIMITED 40 pin connector MIL-C-83503 40 pin connector MIL-C-83503 40 pin connector Static Electricity

ZU

Flow Characteristics 93 93 93 93 Vacuum pressure Air consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10 67 Air consumption 53 53 53 53 40 40 40 40 10 5 27 27 27 27 Suction

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Clean Regulator/Fluororesin Type

Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40

V

I M E N S I O N S B A S I C T Y P E N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm T Y P E 2 Body Ported 4 Manifold Type-Common SUP 6 Manifold Type-Individual SUP S U P P LY P R E S S U R E H 5 Bar M 3.5 Bar P O R T T H R E A D Nil PT* Remove (N) when ordering T NPTF S W I T C H E S Model Standard Supply Pressure Max.

Regulator Valve

Connection thread: M5 First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn. Once lubricant is utilized within the system, since the original lubricant applied within the product during manufacturing will be washed away, please continue to supply lubrication to the system.

TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Vacuum Module: Ejector System Series ZX

Release flow rate adjusting needle Ejector exhaust PV/V port size 05 07 0.5 mm 0.7 mm With silencer Port exhaust Rc Common exhaust (Manifold only) 1 Nil Nil Y M5 x 0.8 L Without lock nut 1 8 2 (1) 10 1.0 mm M6 x 1 (Option) With lock nut 3 (2) Vacuum switch electrical entry Note 1) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil N Variations Model LVC20 LVC30 LVC40 LVC60 LVC50 Orifice diameter 4 8 10 22 16 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13 19 1/8 3/16 1/4 3/8 1/2 3/4 Different diameter tubings can be selected within the same body class.