Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.
Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.
Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.
M5 fittings for M5 thread are attached without being incorporated.
M5 x 0.8 Use the connection thread. M5 x 0.8 Use the connection thread. Use the connection thread.
The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.
PSE54 1 M3 C2 Port size M3 M3 x 0.5 M5 female thread, through type IM5 Note) At the factory, the connector is not attached to the cable, but packed together with it for shipment. M5 M5 x 0.8 M5 female thread, through type (with mounting hole) 01 R 1/8 (with M5 female thread) IM5H Option N01 NPT 1/8 (with M5 female thread) R04 4 reducer R06 Description Part no.
(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,
10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 11 10 14 12 17 17 12 13 14 14 20 20 CJ5 CG5 HY P Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF
(mm) M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 M4 x 0.7 Piston rod thread Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 G 1/8 G 1/8 M5 x 0.8 Action Double acting, Single/Double rod Rubber cushion/Single rod Fluid Air Proof pressure 1.5 MPa CJ1 Max. operating pressure 1.0 MPa Spring return 0.05 MPa 0.05 MPa Min. operating pressure CJP 0.1 MPa 0.08 MPa Spring extended 0.08 MPa Air cushion/Single rod
(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages
M3 AS1001F-23 3.2 AS1211F-M5-23 AS1311F-M5-23 M5 AS1211F-M3-04 AS1311F-M3-04 M3 AS1001F-04 4 AS1211F-M5-04 AS1311F-M5-04 M5 AS1001F-06 6 AS1211F-M5-06 AS1311F-M5-06 M5 For details about one-touch fittings, miniature fittings and speed controllers (applicable tubing O.D. 2 only), refer to the catalog ES50-25 (B edition or later).
mounting hole Approx. 4 35 (L3) (5.2) 52 (L4) 73.5 Stations D side U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P
Adjustment: Max.10.2 2 x M5 x 0.8 1.5 7 3 x 4H9 long groove depth 3 +0.030 0 B port A port 0.5 ( A , B , C ) 4 x M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 158 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.
(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17
M D2 L A D1 NPT, R(PT) Nylon Urethane M5 0.8 M6 1.0 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 36.5 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 1 8 M5 0.8 M6 1.0 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6
+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the
Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6
Disconnected state Disconnected state Disconnected state Connection/Operating port Disconnection/Operating port Operating port M5 x 0.8 M5 x 0.8 M5 x 0.8 Operating port (0.4 to 0.7 MPa) Positioning mark Positioning mark On the basis of the t dimension at the time of connection, move the AHC unit until the dimension becomes 0 to 2 mm larger.
Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.