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Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

The Logic Function Blocks .5-1 5.1 The AND Block . 5-1 5.2 The OR Block . 5-1 5.3 The NOT Block . 5-2 5.4 The XOR Block (Exclusive OR) . 5-2 5.5 The NAND Block (Not AND) . 5-2 5.6 The NOR Block (Not OR) . 5-3 viii PneuAlpha 6.

(a contact) Resistance load 2 A, Induction load 80 VA, Lamp load 100 W 5 VDC 2 mA Output signal timing chart Closed 10 min 10 min Operating signal Open 60 min Within 60 min Error signal N.O. (a contact) Error signal N.C.

flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc.

(Non-polar) 5 V, 12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay

When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). 29 - LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio) ratio 4/7) Parameter *1,*2 Para.

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

K 18.5 8.5 5 8.5 5 NA x M4 x 0.7 thread depth 5 8 10 5 9.5 J I Max. 11 (With stroke adjuster at retraction end) 8 4.75 Operating port 2 x M5 x 0.8 9.5 2 4H9 depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9 9 4.2 8.5 B A 8.5 18.5 8.5 18.5 H G (NN 1) x H Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35

Note 2) ( ): Without sub-plate. 1730 5 Port Air Operated Valve Series SYA3000/5000/7000 Flow Characteristics/Weight Model/Series SYA520 (Body ported) Valve model Type of actuation Port size Flow characteristics Mass (g) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Cv b Cv 58 64 P, EA, EB A, B C [dm3/(sbar)] C [dm3/(sbar)] Single Double Closed center 2 position 1.9 0.35 0.49 2.4

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.

LVD LVQ How to Order Manifold Base LQ1 LVN LLH 2 A 05 02 C TL/TIL Body class Material LQ3 Body class 2 3 4 Manifold PFA Symbol C Symbol 2 3 4 Thread type Thread type Rc NPT Symbol Nil N Base type Port size (port P) A Stacking type Manifold stations Port size 1/4 3/8 1/2 Symbol 02 03 04 Body class 2 3 4 02 2 stations 05 5 stations How to Order Valve LVH 2 0 02 C A Threaded type Body class

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 Step Motor (Servo/24 VDC) 15 (5.5) (6.3) Actuator

: 5 to 40C, High-temperature environment specifications (option): 5 to 45C, Humidity: 30 to 70% Clear water, 15% ethylene glycol aqueous solution Note 5) Circulating fluid Note 3) Temperature range setting Note 2) (C) Cooling capacity Note 4) (50/60 Hz) (W) Temperature stability Note 6) (C) 5 to 40 Circulating fluid system Electrical system Facility water system 1100/1300 1700/1900 2100/2400

Ion generation stop mode . 4-5. Alarm functionIZT43 . 4-5-1. Alarms for IZT43 . 4-5-2. Details of the alarmsIZT43 . 4-6.Replacement of the assembly . 4-6-1. Replacement of the emitter cartridge . 4-6-2. Replacement of the high voltage cable assembly or the body assembly. 5. Performance . 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 5-2.

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART. 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter