Valve Single Unit M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M
2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !
M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M
Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" 2 6, 10, 16, 20 (1) AS1001F AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 2 size added to applicable tubing sizes Metric size (Release button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS3001F
2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20
across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 5 5 5 7 7 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet 1.8 1.8 1 1.8 1.2 1.2 10 13 16 11 14 17 Lateral With
PNP) 2-wire 4-wire (NPN) 5 V, 12 V 12 V IC circuit Relay, PLC Terminal conduit Yes 24 V Diagnostic indication (2-color) 5 V, 12 V IC circuit Grommet 12 V 5 V, 12 V IC circuit With diagnostic output (2-color) 3-wire (Equiv.
5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.
1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-3 2.2.1 HRL-A-40 (Air-cooled type) . 2-3 2.2.1 HRL-W-40 (Water-cooled type) . 2-3 2.3 Function of Parts . 2-5 Chapter
1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR010-A-10. 2-1 2.1.2 HRR010-W-10. 2-2 2.1.3 HRR010-A-20. 2-3 2.1.4 HRR010-W-20. 2-4 2.2 Name and Function of Parts . 2-5 2.2.1 HRR010-A-10/20. 2-5
1-5 1.7 Waste disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH090-A-20/40-(In case of air cooled type) . 2-2 2.2.2 HRSH090-W-20/40-(In case of water cooled type) . 2-3 2.3
override Direct manual override G 1/2 electrical entry G 1/2 electrical entry 5-Rc 3/8, 1/2, 3/4 5-Rc 3/8, 1/2, 3/4 ( ): Rc 3/4 ( ): Rc 3/4 3-8-89 90 Series VFS5000 2 position single/double, 3 position closed center/exhaust center/pressure center/double check Non Plug-in 2 position single: VFS5110-E, VFS5110-D 2-7 mounting hole 5-Rc 3/8, 1/2, 3/4 Rc 3/4: 3(R2), Rc 1/2: 5(R1) G 1 2 Applicable
2 w e !3 !4 r t y u i !5 !6 No.
Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4
Standard Stroke (inch) Mounting Max. stroke as standard Note 2) Standard stroke 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 Long stroke -X142US Note 3) Front nose mount (B) 12 32 32 12 12 40 Rear pivot mount (C) 40 Double end mount (E) 40 20 Block mount (R) Note 3) Double rod (W) Note 3) Note 1) Minimum stroke for mounting
) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.
1 4 3 VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for
1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2-3 2.4 Operation Display Panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport.
Note 2) Refer to p.5.3-5 for lead wire length.