VS7-6

Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:

Compact Proportional Solenoid Valve Series PVQ

' ()* ( + #$ ( + Interface & ' & ' "#$ % "()* % / Compact Proportional Solenoid Valve Series PVQ30 How to Order ARJ AR425 to 935 Option Nil F None 31 N.C. 01 Port size Valve type AMR Foot bracket 1/8 (6A) Bracket is not mounted but is provided at the time of shipment.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Precision Clean Regulator

purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

sub-plate 1/8 NPTF 1/4 NPTF 3/8 NPTF 01T 02T 03T Symbol (A) 2 N.C. 1 IP65 Option (Y, YZ only) 1 (P) 3 (R) Metal seal Rubber seal W Standard IP65 rated (A) 2 N.O. 2 1 (P) 3 (R) Manual override (A) 2 N.C.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Digital Flow Switches

1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

7.4

type) 2 x 1/8 3(R) port = Thread type Manual override 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) 2 x 4.5 Mounting hole 81 (Closed center) R 3 P 1 X 36.5 9 32 24.1 P 1 15.6 2 x 1/8 1(P) port = Thread type 10.2 Indicator light Stations 1 2 3 4 5 6 7 8 n D side U side 39.7 With plug connector/light B 2 B 2 20 14 A 4 A 4 5 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port>

ZX

20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

D

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

Digital Flow Switches, Series PF2A, Series PF2W

1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Guide Cylinder/Compact Type Series MGC

5 @6 #1#2 #3 !8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !0 $5 A View A-A' A' Ball bushing bearing Front mounting flange type B B' @6 @0 !8 $3 y !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

Speed Controller with

01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch fittings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. *1 Fluorine grease is used. *2 The cleanliness class (ISO class) is 5.

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External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

NARM Ser ies

8 1 8 (80 X n) + 23 Common IN .13 (57) NARM1000 1 8 1 8 (79 X n) + 25 Individual IN Common IN 1 4 1 8 (188 X n) + 43 NARM2000 .3 (136) Individual IN 1 8 1 8 (187 X n) + 45 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

CJ2X/CUX/CQSX/CQ2X/CM2X

to 200 mm/s 0.5 to 200 mm/s C J G5-S 8 M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 M10 x 1.25 M10 x 1.25 JIS Class 2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Manifold Regulator ARM1000/2000 Series

8 1 8 ARM1000 57 1 8 1 8 IRV 1 4 1 8 ARM2000 136 1 8 1 8 VEX How to Order SRH ARM 1000 A1 5 01 G SRP Semi-standard Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting SRF Number of stations Note 1) Pressure gauge for 1.0 MPa is used.