ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

NCA1

Mounting ... 13 Dimensions . 14-40 Double Acting/Double Rod . 14-16 Non-Rotating Rod . 17-19 Stainless Steel Rod (XC6) Low Speed (XB9) . 20 High Temp (XB6)/Low Temp (XB7) . 21 Special Trunnion Location (X46US) . 22-23 Oversized Rod w/ Special Trunnion Location (XB5 X46US) . 24 Stainless Steel Tie Rods/Tie Rod Nuts (X130US) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33

HRS100/150

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat

CNS

Tubing material Nil Rc Locking direction n L Foot style TN NPT Nil Aluminum tube F Rod side flange style F Steel tube D Both directions G Head side flange style Auto switches are not available with steel tube.

IDU/IDF

22 Accessories (Options) Base Integrated with Transformer Dryer Transformer E F D C A Part No.

Refrigerated Air Dryer

G Evaporation thermometer Ventilation direction C Ventilation air inlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H N M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9 [125] 12.0 [304] 1.3 [33] 2.9 [73] 1.2 [31] 1.4 [36] 6.1 [154] 0.8 [21] 13.0 [330] 0.6 [15] IDFB3E

Refrigerated Air Dryer

an accessory for the thread symbol F.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

CEx-OMI0064

UP/DOWN On OFF SET )On/OFF MODE , SEL. , SET RIGHT LEFT UP DOWN RIGHTLEFTUPDOWN 10N 19 - 7-3 7-3-1 -7,999,999+7,999,999, F, (+8,000,000 ,F,-8,000,000 ,-F ,,F) 6 (-999,999+999,999),6 7-3-2 , 0 , ,RS-232C BCD ,,, 7-3-3 ,14 No. 2 1 1 OFF OFF 2 OFF ON 3 ON OFF 4 ON ON 7-3-4 No.

MRHQ

Calculation example Calculation for allowable external force (with moment load) When static load f = 10 N, which produces pitch moment to the point L = 30 mm from MRHQ16D guide, is applied. Operable condition requires that F be bigger than f.

Integrated Controller

Initial value: Set to [0.50] or higher. 33 Slider Type/EQFSH Series Integrated Controller Electric Actuator Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Transfer

F F 76.5 91 110 H 73 88 106 J 40 46.5 55 K 46 58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 PP 56 62.5 78.3 O 69 84 102 KK 15 16

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

RB/RBL/RBQ

15 15 20 25 33 13.9 16.2 21.9 31.2 41.6 10-18-3 4 Shock Absorber Series RB Series RB/ Shock Absorber Technical Data: Model Selection 1.

CQS

7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5 28 3.5 3.5 5.4 5.4 12 16 20 25 M4 x 0.7 M4 x 0.7 M6 x 1.0 M5 x 0.8 M6 x 1.0 M6 x 1.0 Note

Stroke Reading Cylinder and Counter

24 V F Black 0 V -X G Shield 649 CEP1 Series Construction 12, 20 !