Compact Type Dual-Rod Cylinder Series CXSJ 0.2 33 0.2 20 42 8 8 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2-M3 x 0.5 through 6.5 2-M4 x 0.7 through M3 x 0.5 x 10 L (Hexagon socket head cap screw) M4 x 0.7 x 14.5 L (Hexagon head bolt) M4 x 0.7 (Hexagon nut) (16) (8+ Stroke) 2-M3 x 0.5 through 4 33 0.2 6 11 Compact Type Dual-Rod Cylinder Series CXSJ Dimensions: 6, 10 Axial Piping CXSJ6P 9 + Stroke 10 0.3 12.8
Controller Set Up (P.33) Incorrect parameters The actuator is displaced Check that the Basic Parameter Setup in the controller (Card Motor product number and mounting orientation) are correct.
LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions
1]OUT1(29)[F 2]OUT2(47) -23No.PF-OMS0001CN-A <> 1 [P_1][n_1] [] 500 L/min OUT1OUT2[P_2][n_2] [F 1]OUT1(29)[F 2]OUT2(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni] 1 [ L] L/min [ oU1] OUT1 [ HYS] [ 1ot] OUT1 [ 1_P] [ 250] 250 L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
U H with effective thread depth C 4-N through hole 8-O counter bore F F I 26 13 Connector auto switch 20 (22) D D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M E J S B + Stroke L + Stroke L A + 2 strokes Note) The drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.
Step data writing to the controller will begin. 34 No.SFOD-OMT0012-A f) Completion Writing is completed when the progress bar disappeared.
No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42
Mounting ... 13 Dimensions . 14-40 Double Acting/Double Rod . 14-16 Non-Rotating Rod . 17-19 Stainless Steel Rod (XC6) Low Speed (XB9) . 20 High Temp (XB6)/Low Temp (XB7) . 21 Special Trunnion Location (X46US) . 22-23 Oversized Rod w/ Special Trunnion Location (XB5 X46US) . 24 Stainless Steel Tie Rods/Tie Rod Nuts (X130US) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33
G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat
Tubing material Nil Rc Locking direction n L Foot style TN NPT Nil Aluminum tube F Rod side flange style F Steel tube D Both directions G Head side flange style Auto switches are not available with steel tube.
22 Accessories (Options) Base Integrated with Transformer Dryer Transformer E F D C A Part No.
G Evaporation thermometer Ventilation direction C Ventilation air inlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H N M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9 [125] 12.0 [304] 1.3 [33] 2.9 [73] 1.2 [31] 1.4 [36] 6.1 [154] 0.8 [21] 13.0 [330] 0.6 [15] IDFB3E
an accessory for the thread symbol F.
T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)
Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .
UP/DOWN On OFF SET )On/OFF MODE , SEL. , SET RIGHT LEFT UP DOWN RIGHTLEFTUPDOWN 10N 19 - 7-3 7-3-1 -7,999,999+7,999,999, F, (+8,000,000 ,F,-8,000,000 ,-F ,,F) 6 (-999,999+999,999),6 7-3-2 , 0 , ,RS-232C BCD ,,, 7-3-3 ,14 No. 2 1 1 OFF OFF 2 OFF ON 3 ON OFF 4 ON ON 7-3-4 No.
Calculation example Calculation for allowable external force (with moment load) When static load f = 10 N, which produces pitch moment to the point L = 30 mm from MRHQ16D guide, is applied. Operable condition requires that F be bigger than f.
Initial value: Set to [0.50] or higher. 33 Slider Type/EQFSH Series Integrated Controller Electric Actuator Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.