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C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

Example: Full scale reading 100 [kPa] Setpoint for output 50 [kPa] Repeatability 1 [% F .S.] F.S. = 100 [kPa] 0 [kPa] = 100 [kPa] 1 [% F .S.] = 100 [kPa] x 0.01 = 1 [kPa] The deviation from the setpoint is 1 [kPa]. This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.)

098) C RESET <> ON SVRE ON <> <> DRIVE ON(0-099) C RESET <> (0-149) RESET SVON <> D <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> <> FROM FROM (0-912) E <> <> Modbus OFF Modbus (0-913) E <> <> (0-914) E <> 44 No.SFOD-OMT0011CN-A (3-2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B RESET <> <

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05MPa 0.7MPa 0.18MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: ,1001 st to Fluorine grease Particle generation grade (Refer to front matter pages 13

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

/C VBA Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C VE Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.

[F 7] Setting of fine adjustment of display value 0% 1 s Mounting and Installation Manual [F 8] Setting of auto-preset Display to show the unit specification OFF [F 9] Setting of power saving mode 1 s Installation Mounting Mount the optional bracket and panel mount adapter to the Pressure switch.

0 0 0 5 6 7 8 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter AFF/AM/AMD Series Dimensions: AFF, AM, AMD H Bracket K L N O J M D C I E P Bracket (Accessory) F B OUT IN Option H: Auto drain (1.6 MPa) Flange drop prevention stopper (Do not

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

[F 0] Unit conversion function URL http://www.smcworld.com Unit specification Model Default setting Unit specification Model Default setting Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Nil or M ISE30A P ISE30A MPa psi ZSE30A(F) kPa ZSE30A(F) Note: Specifications are subject to change without prior notice and any obligation

(mm) A B C D E F G H J L Port size Bracket part no.

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

Consult factory for strokes less than 10mm. 6.1 16 External Feedback Lever (IP6000 type) Stroke Order Code Unit Number Size M Size N P368010-20 5 9/10" 4 9/10" 10~85 mm (Nil) 5 M N P368010-21 7 2/3" 4 1/3" 35~100 mm (E) P368010-22 10 4/5" 4 1/3" 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 6 0 0 0 / I P 6 1 0 0 IP6000 TYPE: LEVER TYPE FEEDBACKNO TERMINAL BOX (FM Model) IP6000 TYPE: