High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Parallel Style Air Gripper: Wide Type Series MHL2

0.7 M5 x 0.8 M6 x 1 M8 x 1.25 488

ZQ

b view 4 6 2 a 5 a 5 5 Component Parts No.

Compact Vacuum Ejector Series ZQ

L Nil B LO Note) Only the "Nil" type is available with a latching type.

Compact Cylinder with Air Cushion Series RQ

Hs A B A B 32 to 50 D-A73C D-A80C D-J79C D-A79W D-F7W D-F7V Approx. Hs Approx.

KP/KPQ/KPG

1 15-5-13 Series KP/KPG Dimensions Male Connector: KPQH, KPGH (M5) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06

JCRB-OM00003

[J] 0.00015 0.001 0.003 0.02 0.04 Radial 15 15 25 30 60 Shaft load N Thrust 10 10 20 25 40 Port size M5 0.8 (90, 180 ) M3 0.5 (270 ) M5 0.8 B Note1) Size 10 requires at least 0.35 MPa of operating pressure to reach the minimum rotation time (0.03 s/90).

EX510

M5 1/8 1/4 3/8 SY3000 SY5000 SY7000 SY9000 1.1 2.8 4.5 10.0 SYJ Port size for A, B ports Applicable cylinder size (reference) 25 40 50 Sonic conductance: C [dm3/(sbar)] (representative value) Series Piping with one-touch fittings Metric size Inch size Thread piping 4 6 8 5/32" 1/4" 5/16" M3 M5 1/8 SYJ3000 SYJ5000 SYJ7000 0.46 0.83 2.9 S0700 Port size for A, B ports Applicable cylinder size

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

JA/JAH/JB/JS

end nut (mm) d: Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

PSE530/200

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when workpiece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when workpiece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the workpiece for a few times. The optimum values will be set automatically.

Precision Regulator

Flow Rate Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !6 Needle O-ring NBR Stainless steel 303 y !7 O-ring Seat ring NBR Stainless steel 303 u !8 O-ring Needle guide NBR Stainless steel 303 i !9 Gasket Lock nut M5 type only NBR, Steel Stainless steel 303 o @0 Lock nut Spacer PBT Note) Stainless steel 303 !

AR Series Modular Type Regulator

Modular Type Regulator AR Series AC-A Regulator AR Series AF-A Model Port size Options AF-A AR10-A M5 x 0.8 AR-A AR-A AL-A AR20-A 1/8, 1/4 AW-A Bracket AC-B AF-A AR25-A AF-A 1/4, 3/8 Round type pressure gauge AR -A -B AR30-A AL-A Set nut (for panel mount)* AW -A -B AR40-A 1/4, 3/8, 1/2 AW AG AR40-06-A 3/4 * For AR20-A to AR40-06-A, panel fitting dimensions are different from those of the

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

3

16.5 19.5 B 7.5 9.5 10.5 10.5 14.0 17.0 A 33.0 32.0 34.0 27.5 31.5 32.0 B 12.5 14.5 15.5 15.5 19.0 22.0 A 26.5 25.5 27.5 21.0 25.0 25.5 B 6.0 8.0 9.0 9.0 12.5 15.5 A 27.5 26.5 28.5 22.0 26.0 26.5 B 7.0 9.0 10.0 10.0 13.5 16.5 B 4.5 6.5 7.5 7.5 11.0 14.0 A 27 20.5 24.5 25 B 8.5 8.5 12 15 20 25 32 40 50 63 Note) When setting an auto switch, confirm the operation and adjust its mounting

MHC2

Operating equipment: MHC2-6D A part a b c d e f = 20 (mm) = 3 (mm) = 4 (mm) = 4 (mm) = 5 (mm) = 6 (mm) b c a e B part f d z f1 x.Calculate the inertial moment of the attachment. Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).