MXS Series Air Slide Table

GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 15 60 + 45(n 2) 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 10 75 90 100 110 D-A9lV n (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (

XL

P.12 to P.15 3 ( Size ) 16, 25, 40 XLFV (With solenoid valve) High speed operation O-ring Seal 2 x 105 to 10-5 10-10 10-10 High volume operation 2 ( Size ) 50, 63, 80 XLG Double acting P.16 to P.19 XLGV (With solenoid valve) XLD Standard Reduces particulates Single acting (N.C.)

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

ZP3

across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.

NCQ8

2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 #6-32UNC1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4 1/2 5 5-1/2 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

One-touch Fittings

9 1/2 15 to 30 14 to 15 2) The gasket can be reused up to 6 to 10 times.

Solid State Auto Switches

Weight (g) Auto switch model Applicable bore size (mm) Weight D-G39C-4, K39C-4 40 50 63 80 100 162 D-G39C-5, K39C-5 166 D-G39C-6, K39C-6 184 D-G39C-8, K39C-8 210 D-G39C-10, K39C-10 232 Dimensions (mm) 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 4 x Z Hexagon socket head cap bolt G (PF) 1/2 (Applicable cable O.D. 6.8 to 9.6) Indicator light Most sensitive position Dimensions

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 100 100 110 120 10 D-A5, A6 D-F5, J59 10 + 55 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 120 + 55 100 + 55 (n = 4, 8, 12, 16 )Note 2) 100 + 55 "n" pcs. (same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 2 pcs.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D-Y69 D-Y7PV D-Y7WV 70 65 75 85 10 60 60 + 30 (n 4)/2 n = 4, 8, 12, 16 75 + 30 (n 4)/2 n = 4, 8, 12, 16 85 + 30 (n 4)/2 n = 4, 8, 12, 16 10 + 30 (n 2)/2 n = 2, 4, 6, 8 65 + 30 (n 4)/2 n = 4, 8, 12, 16 70 + 30 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

2/3 Port Valve

DC (1) (2) AC 20 10 Min. 10 5 VX22 Option Material DC No. Description Note 1) Dew point: 10C or less. Note 2) 50cSt or less Note 3) "D", "N", "V", etc. in the parenthesis are option symbols.

Series VQ Base Mounted Metal Seal/Rubber Seal

298 20 254.5 272.5 300 310.5 21 265 283 312.5 323 22 275.5 293.5 325 335.5 23 286 304 325 335.5 24 296.5 314.5 337.5 348 L1 L2 (L3) (L4) Vacuum ejector unit style: Equation Manifold F kit (Top entry connector)SV5Q11M, #1 F kit (Side entry connector)SV5Q11M, #2 Valve 2 position singleSV5Q11V, #9 2 position doubleSV5Q11V, #10 3 positionSV5Q11V, #10 L1=10.5n+28.7+(number of ejector units X

HRX-OM-M090

Specification Power supply output 12(DC 24V) DC 24V 10% 0.5A MAX1 11(24V COM) 10(Contact input signal 1) Contact input signal 1 9(Common of contact output signal 1) NPN open collector output PNP open collector output 8(Contact input signal 2) 7(Common of contact output signal 2) Contact input signal 2 1To use the power of the device, the total load current must be 500mA or less.

One-touch Fittings Series KQ2

13.5 2.7 2.7 6 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 3 8 1 2 11.8 13.8 10.0 9.9 10.7 17.2 17 4 10.0 5 14 8 18.5 16.2 6 23.3 17 10.0 17.2 5 17 10 27.5 21 26.6 39.0 8 22 28 33.5 29 28 39 35 46.0 8 19 12 44.5 22 60.0 10 22 10 12 81 113 (81) (96) 25 24 25.7 16 Reference dimensions after R(PT) thread installation.