Multistage Ejector (N)ZL Series

Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent

MHx-OMY0005

(1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7. () 2-3 1. 2. 3. 4. 6 5.

VQ4000/5000 (Pilot Valve V100)

No.VQ4000V-OMV0001 Solenoid Valve PRODUCT NAME VQ4000/5000 (Pilot Valve V100) MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4,5,6 Selection -4,5,6 Mounting -6 Piping -6 Wiring -6 Lubrication -7 Air Supply -7 Operating Environment -7 Maintenance -7,8 Specific Product Precautions -9 ~11 Construction and optional parts -12~15 Trouble shooting -16,17 -1S VQ4000V-OMV0001

FQ1

2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

Metric size Inch size Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

EX260-SMJ_eng

Bit No. 6 4 6 4 2 0 0 0 Solenoid on side A 0 2 4 6 8 16 28 30 Output No. Internal terminating resistor is connected Side D Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof.

FQ1

2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Membrane Air Dryer

If they enter the inside of products, they could cause products to malfunction, lower performance or damage the element. d.

AF800/900

DR Note 3) Symbols "2", "6" and "8" can not be specified at the same time. (Ex.) 68 Note 4) Symbols "9", "D", and "J" can not be specified at the same time. (Ex.) 9 specified at the same time. (Ex.) 9DJ 2 2 Flow rate (l/min(ANR)) The bowl of series AL is used.

SRP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

“Going to

D. (mm) 4 6 8 10 12 3.18 4.76 6.35 9.53 12.7 2.5 4 5 6.5 8 2 3.18 4.23 6.35 8.46 Black (B) White (W) Red (R) Blue (BU) Burst Pressure Characteristics Curve Yellow (Y) Green (G) Clear (C) Orange (YR) Nominal size (inch) 5 32 " 5 16 " 1 4 3 8 " 3 16 " 1 8 " 1 2 " " Specifications Fluid Air, Water Max. operating pressure 0.8MPa at 20C Refer to pressure characteristics curve.

SRP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

VXZ

B N.O. 1/2 G 15 With surge voltage suppressor C 110 VAC Stainless steel D 200 VAC 5 20A H C37 N.C. 3/4 20 E 230 VAC C N.O. J Stainless steel F 24 VDC 6 25A N.C. K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

3 Controller mounting Nil D Screw mounting DIN rail mounting1, 2 1. Only available for the controller types 6N and 6P. 2. DIN rail is not included. Order it separately.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Intrinsically Safe Valve 5 Port Solenoid Valve Series 53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

Normally closed (NC = b contact) solid state auto switches (D-Y7G/Y7H types) are also available. Refer to page 961 for details. Auto switches are shipped together (not assembled).

S

U side Base mounted plug-in 3 1 2 Stations D side 9

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, Optional DIN rail mount, 6 port sizes available, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD

Type: 10S (Side Ported), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 4 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 6 (for 6 Stations; Longer Rail than Total Length of