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The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 2.84396 lb, ModelActuator

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, 6.28317 lb, ModelActuator

Flow control of cooling water for welding gun Fluid Vortex generator Vortex detector For Water Series variations Model Measured flow range l/min (SCFM) Output specifications Port size 2 to 16 (0.07 to 0.56) 5 to 40 (6.18 to 1.41) 0.5 to 4 (0.02 to 0.4) NPN PNP Rc 3/8 1/2 3/4 3/4 3/4 NPT 3/8 1/2 G 3/8 1/2 New PFW704 Integrated display type PFW720 New PFW740 PFW300 New PFW310 New PFW320 Display

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480 ECC-PNAL-PRO-B Effective April 1999 Specifications are subject to change without notice.

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

2.5 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 1/8", 3/16", 1/4", 4, 6 tubing 1/2", 12 tubing 3/8", 10 tubing 3/4",19,1" tubing 4 6 8 10 12 19 TL Series LQ1 Series LQ2 Series 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" TIL Series 2 New PFA New PFA New PFA Digital Flow Switch for Deionized Water and Chemicals Super PFA Super PFA Super PFA Minimum measurable flow rate is available from 1.6

C.], [N.O./ N.O.] and [N.C./ N.O.] are available. o possible. up to 40 10.5 0.35 1.1 0.28 up to 63 16 0.18 2.4 0.48 up to 100 20.5 0.21 4.3 0.93 up to 125 24 0.18 7.0 1.6 Note) Values for 2-position single with tie-rod base manifold from the cylinder port to the exhaust.

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219 357 253.5 L2 81 322.5 127.5 196.5 300 162 231 369 265.5 L3

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

VHS2500 VHS3500 VHS4500 VHS5500 Model 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 1 1(P)/2(A) Piping port 1/2 1/4 1/8 3/8 3(R) 110 (6.11) 130 (7.22) 16 (0.89) 31 (1.72) 10 (0.56) 14 (0.78) 22 (1.22) 38 (2.11) 57 (3.17) 1(P) 2(A) Effective area (mm2) (Cv) 2(A) 3(R) Combination with a modular style FRL is possible. 33 (1.83) 40 (2.22) 14 (0.78) 29 (1.61) 11 (0.61) 16 (0.89) 15 (0.83) 29 (1.61) 51 (2.83

Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm) Maximum suction flow rate (l/min (ANR)) 18 24 36 40 20 26 36 38 45 Air consumption (l/min (ANR)) Diffuser construction Model S ZMA05H ZMA07H ZMA10H ZMA13H ZMA07M ZMA10M ZMA13M ZMA13S ZMA15S 0.5 0.7 1.0 1.3 0.7 1.0 1.3 1.3 1.5 12 23 46 95 16

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

Adsorption surface size SP2330 SP2430 SP2530 SP2630 150 x 150 180 180 20 150 82.5 82.5 105 16 200 x 200 230 230 20 200 107.5 107.5 130 25 250 x 250 280 280 25 250 132.5 132.5 155 36 300 x 300 330 330 25 300 157.5 157.5 180 49 755 SP Series Made to Order Please contact SMC for detailed specifications, delivery and pricing.

Number of pages has been increased from 16 to 28. VZ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

(mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

DXT170-34-1B Note With mounting screw (M3 x 8) Refer to pages 3-3-13 to 3-3-16 for manifold use. 3-3-9 Series VZ1000 Specifications Applicable for cylinder actuation (up to 16). Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Valve configuration Pilot type 4 port solenoid valve Air 0.15 to 0.7 10 to 50 (No freezing.

Other dimensions are same as grommet type. 10 117.5 111.5 9 107 101 8 96.5 90.5 7 86 80 6 75.5 69.5 5 65 59 4 54.5 48.5 3 44 38 20 222.5 216.5 2 33.5 27.5 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 Station L1 L2 4-3-13 Series SY100 Type S41 Manifold: Side Ported/SS3Y1-S41-M3/M5 Stations Grommet (G), (H) 11.5 P = 10.5