: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: NPN open collector 2 outputs (0 to -101 KPa), Unit specifications: With unit selection function, Solenoid valve rated voltage

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: PNP open collector 2 outputs (0 to -101 KPa), Unit specifications: With unit selection function, Solenoid valve rated voltage

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: NPN open collector 2 outputs (0 to -101 KPa), Unit specifications: With unit selection function, Solenoid valve rated voltage

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: PNP open collector 2 outputs (0 to -101 KPa), Unit specifications: SI unit fixed, Solenoid valve rated voltage: 24 V DC, Vacuum

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: PNP open collector 2 outputs (0 to -101 KPa), Unit specifications: SI unit fixed, Solenoid valve rated voltage: 24 V DC, Vacuum

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: NPN open collector 2 outputs (100 to -100 kPa), Unit specifications: With unit selection function, Solenoid valve rated voltage

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally closed / normally closed, Electrical entry: L-type plug connector, without connector (with light / surge voltage suppressor), Output specifications: PNP open collector 2 outputs (100 to -100 kPa), Unit specifications: With unit switching function (default: psi), Solenoid valve

: 5:50～, Suction Flow(l/min): 5, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: Normally open / normally closed, Electrical entry: L-type plug connector, lead wire length: 0.3 m (with light / surge voltage suppressor), Output specifications: PNP open collector 2 outputs (0 to -101 KPa), Unit specifications: SI unit fixed, Solenoid valve rated voltage: 24 V DC, Vacuum

.) / 4 (latching), Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: M5, Application: Individual Item, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction Flow(l/min): 2, Nozzle Diameter: 0.3mm, Exhaust specifications: Silencer exhaust (individual exhaust), Combination of supply

.) / 4 (latching), Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: M5, Application: Individual Item, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction Flow(l/min): 2, Nozzle Diameter: 0.3mm, Exhaust specifications: Silencer exhaust (individual exhaust), Combination of supply

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 5/32 (Ø3.97), Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction Flow(l/min):

Main Body Shape: Unit, Additional Function: Silencers / Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 18, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 5/32 (Ø3.97), Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C):

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

VXZ

B N.O. 1/2 G 15 With surge voltage suppressor C 110 VAC Stainless steel D 200 VAC 5 20A H C37 N.C. 3/4 20 E 230 VAC C N.O. J Stainless steel F 24 VDC 6 25A N.C. K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

Body/Exhaust Type: C (For Manifold - Common Silencer Exhaust), Nominal Nozzle Size: 12 (ø1.2), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: C [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum

Body/Exhaust Type: C (For Manifold - Common Silencer Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: C [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l