Stations: 12 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

Stations: 12 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: None, CE Compliant: Q (CE Compliant)

Stations: 12 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

Stations: 9 Stations, Port Size: C6 (ø6 One-touch Fitting), Common: 0 (+COM), Option 1: None, Option 2: N (Name Plate), CE Compliant: Q (CE Compliant)

Stations: 10 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D0 (DIN Rail Mount w/o DIN Rail), Option 3: None, Option 4: None, Option 5: None, CE Compliant: Q (CE Compliant)

Stations: 4 Stations, Port Size: C8 (ø8 One-touch Fitting), Wiring Specification: N (-COM), Lead Wire Length: 2 (5.0m Cable), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: None, Option 6: None, CE Compliant: Q (CE Compliant)

Stations: 11 Stations, Port Size: C8 (ø8 One-touch Fitting), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 26 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: R (External Pilot), Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

Stations: 6 Stations, Port Size: N9 (5/16" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: None, CE Compliant: Q (CE Compliant)

Stations: 12 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: R (External Pilot), Option 5: None, CE Compliant: Q (CE Compliant)

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), Cable Length: 0 (w/o Cable), Option 1: None, Option 2: None, CE Compliant: Q (CE Compliant)

Stations: 7 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: R (External Pilot), Option 5: None, CE Compliant: Q (CE Compliant)

Stations: 6 Stations, Port Size: C8 (ø8 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

Stations: 10 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (with Cable, 5m), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 1 Station, Port Size: C6 (ø6 One-touch Fitting), Wiring Specification: +COM, Lead Wire Length: 1 (1.5m Cable), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), Option 6: None, CE Compliant: Q (CE Compliant)

reduces flow setting time

32.7 (32.8) AS221FS-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FS-02-06 (S) 6 1/4 17 (17.5) 13 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S)

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

3.2 7.2 13 (13) AS221FSG-01-04 (S) 4 8.2 AS221FSG-01-06 (S) 6 10.4 14 (13) AS221FSG-01-08 (S) 8 13.2 22.4 29.5 14.2 15 (14) AS221FSG-01-10 (S) 10 15.9 25.3 32.4 15.6 16 (15) AS221FSG-02-23 (S) 3.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FSG-02-04 (S) 4 8.2 AS221FSG-02-06 (S) 6

Electric Actuator with Integrated Guide

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation. JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.

240

T4 = 0.2 [s] T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V 40 0.5 200 (0.067 + 0.067) 200 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

LVQ

T) View Z (mm) Dimensions A B C D M N S T U V Model LVQ20-S-3 LVQ30-S-3 LVQ40-S-3 LVQ50-S-3 LVQ60-S-3 25.5 46 31.5 58 7 15 83 35.3 10.6 7 23.5 47 29.5 59 7 15 113.5 36.9 16.5 10 23.5 47 29.5 59 7 20 119 37.9 22 35 70 41 82 7 20 171.5 64 25 17 35 70 41 82 7 20 182.5 66 32 With indicator, High back pressure spec. with indicator N.C. valve Dimensions (mm) S Model LVQ20-S-4 LVQ30-S-4 LVQ40-