Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

Nil Both ends tapped style Head side flange style A G 1 pc S Foot style Double clevis style L D n pcs. n Note 1) Mounting brackets are packed together when shipped (unassembled). Note 2) Since sizes 20 and 25 have a body with type B (Through-hole) and type A (Both ends tapped style) in common, there is no type A part number. Example) RQA 20-30 does not exist.

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

Exhaust Cleaner for Clean Rooms AMP Series

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

AMF

Select the point of contact A of inlet pressure and max. air capacity in the graph. 2. AMF650 is obtained when the max. flow line is above the point of intersection A in the graph. HA AT ID Max. air flow rate (m3/min (ANR)) AMG Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point.

A small amount of air will constantly leak because complete sealing cannot be achieved due to the construction of the product. The operating speed ranges from 80 to 100 mm/s to the high-speed range. Air cushions and shock absorbers are available.

IZ-OMU0031-CN

() 200 ms() 1.5 s() 0.5F.S. 1 digit 3+1/2 7 2 (/)5 /1s OUT1ON ()OUT2ON () IP40 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) 0.5%F.S.(25 ) 5P 4P PBTPBT 30 g() CEUL/CSA 12 5 2 -32No.IZ*-OMU0031 (ZS-28-A) 2 0.2 mm 0.58 mm 1.12 mm 4.1 -33No.IZ*-OMU0031 0.56 mm R R2 2 (n ) <> <> 31Xn +3.5X(n -1) 31Xn +3.5X(n -1) -34No.IZ*-OMU0031 Revision history A 4-14-1, Sotokanda

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

MHT2

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

Plate Cylinder/Double Acting, Single Rod

Grease pack part no.: GR-S-010 (10 g) 87

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

As a result it is necessary for the customer to verify conformity to the EMC directive for the machinery and equipment as a whole. wFor the servo motor (24 VDC) specication, EMC compliance was tested by installing a noise lter set (LEC-NFA). Refer to the catalog CAT.ES100-87 for the noise lter set. Refer to the LECA Operation Manual for installation.

Guide Cylinder Series MGG

Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g) Caution Basic cylinders with a bore size of 50 cannot be disassembled. (Cylinders with 50 or larger bore sizes are tightened with a large tightening torque and cannot be disassembled. Please contact SMC when disassemble is required.) 134

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

As a result it is necessary for the customer to verify conformity to the EMC directive for the machinery and equipment as a whole. @ For the servo motor (24 VDC) specification, EMC compliance was tested by installing a noise filter set (LEC-NFA). Refer to page 44 for the noise filter set. Refer to the LECA Operation Manual for installation.

02-mgg-e

Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g) Caution Basic cylinders with a bore size of 50 cannot be disassembled. (Cylinders with 50 or larger bore sizes are tightened with a large tightening torque and cannot be disassembled. Please contact SMC when disassemble is required.) 134

06-mu-e

Grease pack part no.: GR-S-010 (10 g) 87

Booster Relay Series IL100

e Diaphragm B t Exhaust flow path OUT SUP y Inner valve Signal pressure enters the input chamber q and diaphragm A w and exerts a downward force on diaphragm B e.

AFF

Select the point of contact A of inlet pressure and max. air capacity in the graph. 2. To select one with the maximum air flow rate line that is located above the obtained intersection point A, the model will be AFF37B.

AMD

Select the point of contact A of inlet pressure and max. air capacity in the graph. 2. AMD650 is obtained when the max. flow line is above the point of intersection A in the graph. Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

The S type is a high-vacuum type, and the L type is a large flow rate type.
Refer to the ZH10 models and “Flow Rate Characteristics” graphs below. Symbol “S” (-90 kPa) and “L” (-48 kpa or -66 kPa) are available for the vacuum pressure reached, but they are not related to the nozzle diameter.