XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Large Bore Compact Cylinder Series CQ2

Bore size Operating range Bore size mm (in) OUT () Blue [Black] 180 200 8 (0.3) 8 (0.3) Operating range l (mm) 10 Compact Cylinder Series CQ2 2 Colour Indicator Type Solid State Switches/Direct Mounting Type D-YNW(V), Y7PW(V), D-Y7BW(V) Auto Switch Specifications D-Y7W, D-Y7WV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch model no.

MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

S070

VDC 12 VDC 6 VDC 5 VDC 3 VDC Power consumption (W) Maximum operating pressure (MPa) 0.1 0.3 0.3 0.5 0.1 0.3 Cv factor Symbol 0.021 0.011 0.021 0.011 0.011 0.006 A B C D E Note) 0.35 0.5 0.1 (With power saving circuit) F Note) Note) An option only applicable to 24 VDC plug lead type. 4-11-8 9 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted manifold/Stacking

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

VCB

Printed in Japan. 1st printing June, 2000 D-SMC.L.A. P-80 (D)

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

3

C Stainless steel 1/4 D 3/8 3 10A N.C.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) E H M-5H-4 M-5H-6 15.5 16.5 8.5 9.5 7 8 1.8 2.5 7 8 2.1 4.0 2.7 3.9 6.5 8.5 91 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M5 Hose elbow: M-5HL-4, -6 Part No. Effective orifice(mm2 Weight (g) ) F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.4 2.4 4.4 5.2 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 Hose elbow: M-5HLH-4, -6 Part No.

NAAMS Standards Compliant

Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC

10

D-X 893

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

CEP1

(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV

Ejector Valve Unit Series ZYY/ZYX 1

Number of ejectors 1 to 10 Ejector mounting position U D U side D side [Example: When individual wiring type model 45 for SY3000 is selected] ZZY Y3-45-04D-C6J1U 1SET Note 1) The combined total of solenoid valve and ejector valve stations is a maximum of 20 stations. (Example: When there are 12 solenoid valve stations, there are 8 ejector stations.)

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

Micro-Mist Separator with Prefilter Series AMH

1/2 3/8 1/2 3/4 1/2 3/4 1 3/41 1 1 1/2 1 1/2 2 Port size 1/8 1/4 3/8 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. ftow capacity at a pressure of O.7MPa{7.1 kgflcm').

End Lock Cylinder Series CBG1

P 2-TC TD D I E 0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

AC Servo Motor Driver (Pulse input type/Positioning type)

Driver Servo amp lifier (Note 6) (Note 6) 24VDC (Note 4, 8) (Note 2) CN1 CN1 1 DICOM 9 ALM Trouble (Note 5) RA1 13 DOCOM 11 RD Ready (Note 8, 10) RA2 EM1 SON RES 8 4 3 (Note 3) Forced stop Servo-on Electromagnetic brake interlock 12 MBR RA3 (Note 8, 9) Reset SP1 Speed selection 1 5 RS1 RS2 6 7 Forward rotation selection 10m max.