VFRA3000

B port) (EA, EB port) (P , A, B port) (EA, EB port) 03 04 03 04 03 04 3 position closed center: VFRA43113 position exhaust center: VFRA44113 position pressure center: VFRA4511(Pilot port) Main valve manual override (Direct manual) (Mounting hole) (Pilot port) (P , A, B port) (EA, EB port) 5-3-24

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Hard Polyurethane Tubing, TUH Series

20C (68F) bend the tubing into a U shape.

B)4 5 (A R1)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

T/TIA

Please exercise caution when using this item in a clean room. There is a possibility of plasticizer and other materials precipitating on the tube surface and detracting from the cleanliness level of the room.

07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: w/o Option, Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: w/o Option, Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)