Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Compact and

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Body Size: 40, Thread: NPT, Port: 1/2, Option: C + M, Attachment: T-spacer, Semi-Standard 1: Standard, Semi-Standard 2: Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F

Body Size: 60, Thread: Rc, Port: 1, Option: M [Round type pressure gauge (with color zone)], Attachment: T-spacer, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: Exhaust Mechanism, Non-relieving

Body Size: 40, Thread: NPT, Port: 3/4, Option: C + M, Attachment: T + V, Semi-Standard 1: Standard, Semi-Standard 2: R + Z

Body Size: 30, Thread: Rc, Port: 3/8, Option: M [Round type pressure gauge (with color zone)], Attachment: T-spacer, Semi-Standard 1: Standard, Semi-Standard 2: Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube

Body Size: 20, Thread: NPT, Port: 1/4, Option: M [Round type pressure gauge (with color zone)], Attachment: T-spacer, Semi-Standard 1: Standard, Semi-Standard 2: Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F

Body Size: 40, Thread: NPT, Port: 1/2, Option: M [Round type pressure gauge (with color zone)], Attachment: T spacer, Semi-Standard 1: 8 + J, Semi-Standard 2: Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F

Body Size: 20, Thread: NPT, Port: 1/4, Option: M [Round type pressure gauge (with color zone)], Attachment: T spacer, Semi-Standard 1: Standard, Semi-Standard 2: Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 1, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 5 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 1, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 2, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 2, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Body Size: 30, Thread: NPT, Port Size: 1/4, Option: D + M, Attachment: K + S + T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Material: SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 3/4 Rc, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: Bracket, Made to Order: Differential Pressure Indicator

Material: SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 3/4 Rc, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 5 μm, Element Seal Material: Fluororesin, Accessory: Bracket, Made to Order: -

Material: Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal, Element Length: ℓ250, Port Size: 1/2 Rc, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: Bracket, Made to Order: -

Material: SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 3/4 Rc, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm, Element Seal Material: -, Accessory: -, Made to Order: -

Material: SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 3/4 Rc, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: -, Accessory: -, Made to Order: -

Material: Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal, Element Length: ℓ250, Port Size: 3/8 Rc, Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: -, Accessory: -, Made to Order: -