Series: 2 (VQZ2000), Stations: 13 Stations, Port Size: 01 (Rc1/8)

Series: 2 (VQZ2000), Stations: 13 Stations, Port Size: N7T (1/4" One-touch Fitting), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 3 (VQZ3000), Stations: 13 Stations, Port Size: 02 (Rc1/4), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 1 (VQZ1000), Stations: 13 Stations, Port Size: M5T NPTF Thread

Series: 3 (VQZ3000), Stations: 13 Stations, Port Size: N7T (1/4" One-touch Fitting)

.: 13 (1/2")

Type: TIUZB (Inch), Size: 13 (ODØ12.7 IDØ8.46), Color: B (Black or TUZC: Black Opaque), Roll Length: 20m Roll

Type: TIUZB (Inch), Size: 13 (ODØ12.7 IDØ8.46), Color: R (Red), Roll Length: 20m Roll

Type: TIUZB (Inch), Size: 13 (ODØ12.7 IDØ8.46), Color: Y (Yellow), Roll Length: 20m Roll

Type: TIUZB (Inch), Size: 13 (ODØ12.7 IDØ8.46), Color: W (White), Roll Length: 20m Roll

Type: TIUZB (Inch), Size: 13 (ODØ12.7 IDØ8.46), Color: BU (Blue or TUZC: Blue Transparent), Roll Length: 20m Roll

Stations: 13 Stations, Cylinder Port Size: C4 (One-touch Fitting for ø4), Port Thread: Mfld Pitch: 8.5=Rc (PT); 7.5=M5

Stations: 13 Stations, Cylinder Port Size: N1 (One-touch Fitting for 1/8"), Port Thread: N (NPT)

CJ2

CJ-CF006 CJ-CR006 6 6 8 11 5 8 6 M3 x 0.5 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 10 8 10 13 6 10 8 M4 x 0.7 29 18 2 9 40 22 32 12 8 4.5 3.1 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 16 10 12 15 7 12 10 M5 x 0.8 35 20 14 48 28 38 16 10 5.5 6.4 2.3 +0.048 0 6-3-11

A

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

3 Port Solenoid Valve/

External pilot port) 2 x 5.2 (For mounting) 2 x 3/8" [3(R) port] G12 5 47 (M12 connector) Applicable cable O.D. (3.5 to 7) 62.5 33.5 109 125 96 62.5 35 (90.4) (Variable throttle type) Vent port (6.4) 15.5 15 8 (14) 201.8 (Max. 10) 93.8 24.2 56.2 101.3 75.5 View A For M12 connector 30.5 24.2 (15) 15 Vent port (6.2) e w 3/8" [1(P) port] r Pin number 90.4 28.5 (22.9) (With check valve) 202.4 q 13

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

SUP Stop Valve Spacer

Air operated valves, such as sanitary valve and automatic valve control Note) This product is only for internal pilot specifications, as the external pilot air cannot be shut off. 13-E618 SY30/50/70M-50-1AE How to Order Symbol SY 50 3 E 1A 0M 2-position single valve 2(B) 4(A) Series Manual override 3 SY3000 5 SY5000 7 SY7000 Nil Push-turn locking slotted type EXH. 3(

IIIIIIIIII

(4 66 C) EFFECT OF SUPPLY VARIATION < 0.02 PSI (0.14 kPa) per 1 PSI (6.89 kPa) supply change when dead-ended REPEATABILITY < +/0.05 PSI (.35 kPa) DRIFT < .03 PSI (.21 kPa) after 24 hours RECOMMENDED FILTRATION 5 micron Part Number Description F-4103-30F-4103-33F-4103-36F-4103-37F-4103-38F-4103-39F-4103-39NF-4103-40F-4103-50-5 to 5 PSI -5 to 10 PSI -5 to 20 PSI -8 to 5 PSI -8 to 20 PSI -13