MY2

57 PC 7.2 8.2 5.5 PE 3.7 2.7 5 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PD 2.8 6.6 8.5 PA 40 60 100 PH 5.1 7.5 9.5 "P" indicates cylinder supply ports.

MXS Series Air Slide Table

-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 49 MXS Series Air Slide Table Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment

Booster Regulator/Air Tank

(P3 P2) x 9.9 V [L] = (Q Qb/2) x (Tc x K/60) Obtain the tank capacity V. (841 600/2) x (0.5 x 2/60) V = = 4.6 [L] (1.0 0.8) x 9.9 Applicable combination model Internal capacity Tank model VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) 5L VBA10A/11A Select the tank capacity over V.

MXS

MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static

Coolant Valve

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual override 7 7 Non-locking push type Non-locking push type A (projecting) Nil Semi-standard For other rated voltages, please

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Series AK1000

80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

CHKD/CHKG

(Example) The overall length of the cylinder tube for CHDKDB50-60-XC61, is equivalent to 75 strokes.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

VQZ1000/2000/3000

pilot specifications, refer to page 2-7-60.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30

F/ISE

auto shift input (Brown) DC (+) 1.2K (Brown) DC (+) (Gray) Analog output (Gray) Auto shift input Main circuit Main circuit Main circuit Main circuit Load Load 1k 12VDC to 24VDC Load Load 6.8K 12VDC to 24VDC (Black) OUT 1 (Black) OUT 1 (White) OUT 2 (White) OUT 2 (Blue) DC () (Blue) DC () ZSE F/ISE --62(L)-(M) 50 60 50 60 ZSE F/ISE --70(L)-(M) 50 60 50 60 With analog output With auto shift

C76

15 60 + 45(n 2) 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

C76

60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

C95Series

Part S humber ore size (mm) .B fA TL TU Te TX TE TO TFl OTT TS TH TF 'z TD~HO MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 a9 12j.o10 MB-S04 40 52 80 60 10 60 63 97 17 9 17 12 45 60 93 16 "'0 .010 50 65 60 60 10 92 75 \09 17 9 17 12 45 60 105 16 _g om Mounting plate (Double clevis) MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 BO 105 20 ...0 a64 .20 ~,084 80 95 100 70 \5 \30 110 150