58 2 t Component Parts Component Parts Description Material Note Description Material Note No. No.
Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
I Special bracket major dimensions , t I ' Matenal :Rolled steel KX l KZ KZZ Part No.
0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o
Note 2) Combinations of H and M, R and S, S and T, L and M are not available. Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.
Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected.
The lock is released when it is turned to the right. t 3 Stop switch 185 Stop switch guard A guard for the stop switch 4 y e Prevents unintentional operation (unexpected operation) of the jog test function. Other functions such as data change are not covered.
LQ Thread type Nil T F N For 32A For 40A For 50A 32 40 50 Rc NPTF G NPT Flange LVN Refer to the table (1) given below for availability.
Bore Description Spacer Cover cap screw Seal washer Socket head cap screw Spring washer Sheet gasket Parallel pin Inductive switch Top cover Bumper Switch holder Stopper bolt y Inductive switch e Switch holder CKZ1N-S050 T P Note 1) 50 T P Note 1) Switch cassette 63 i Sheet gasket u Parallel pin CKZ1N-S063 T P Note 1) 80 CKZ1N-S080 !
11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series
T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)
27.6 0.05 84.8 2-M5 x 0.8 thread depth 10 (mounting thread) M5 x 0.8 4-M4 x 0.7 (finger closing port) (attachment mounting thread) M5 x 0.8 (finger opening port) Auto switch mounting groove dimensions 15 10 0 -0.05 5 9 6.2 10 5 Auto switch mounting groove (for D-Y) 23 In the case of single action, the port on one side is a breathing hole. 4 9 Finger position/Narrow type MHZ2-20 N 14 Auto
2 x 9 counterbore M5 x 0.8 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x M6 x 1.0 effective depth 10 Note 2) 2 x 5.4 through 47 25.5 10 36 1 Flat washer 8 10 7 7 25.5 39.5 + Stroke 4.5 36 44 + Stroke Lead wire minimum bending radius 10 Auto switch 25 19 5.5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth
48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust center SYJA3330 (0.067) M5 X 0.8 3 position
C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 17 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.
C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 13 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.