Ejector Valve Unit Series ZYY/ZYX 1

Z S 15 M ZX Series Wiring specifications (Vacuum switch) X3 SX3000 ZR Lead wire length 0.6 m Nil L C CL CN Grommet type Lead wire length 3 m Rated voltage ZM Lead wire length 0.6 m DC specifications Connector type Lead wire length 3 m Connector type 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC ZH Output specifications (Vacuum switch) ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 22 lb

Heavy Duty Stopper Cylinder

0 r #7 @5 !1 !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Air Cylinder CLA Series Fine Lock Model

F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

LEY-OM007

s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEY 16 [ _ / R / L ] LEY 25 [ _ / R / L ] LEY 32 [ _ / R / L ] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400

Series KV2 Fittings

p p p p m m m m R p m m m m m m m p p m m m m p m m m m p p m p m R M R R m p p m m R R m p p p m m p M M m p p m p p m p M m m m p p M m p p p M m p p p M R p R R p M p p R m M m p m m p m M p m m m m m m p m R m R p m m m M m p m m p m M p m m m m m m p m R m R p m m p R M R m m m p M M m p m p m R m m p p p p p p m p p R p p m m m m M m m m m p R m m m m R p m m m p M R R R p 26 Series

Series 10-, 21- AW-B Filter Regulator

R.

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

AC Servo Motor Driver (Pulse input type)

7 800 r/min 5.

MNB

P-76 (M)

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

e r t y u i o !

Auto Switch Guide

L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !