High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.

Smooth Cylinder/Low Speed Cylinder

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40(n 2) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs.

Modular F.R.L. Unit

AR Model Port size Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 3/4 Bracket Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 Pages 36 through 40 AR60 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8 AR40K 1/4, 3/8, 1/2 AR40K-06 3/4 AR50K 3/4, 1 Pages

LEC-OM02704CN

414-40 4.1 43 4.2 46 4.3 47 4.3.1 47 4.3.2 48 4.3.3 CNP1CNP2CNP3 4-10 4.4 4-17 4.5 () 4-18 4.5.1 4-18 4.5.2 4-21 4.5.3 4-22 4.6 () 4-22 4.6.1 / 4-22 4.6.2 4-23 4.6.3 4-26 4.7 4-27 4.8 4-28 4.8.1 4-28 4.8.2 4-29 4.8.3 4-31 4.9 4-32 4.10 4-33 4.10.1 4-33 4.10.2 4-34 4.11 4-35 4.11.1 4-35 4.11.2 4-36 4.11.3 (LE--) 4-39 4.12 4-40 2 - 5 515

Modular Design with Uniform Body Style

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Modular F.R.L. Unit

1 AF + AFM + AR 1/8, 1/4 AF20 AR20 AFM20 AC20C 1/4, 3/8 AF30 AR25 AFM30 AC25C 1/4, 3/8 AF30 AR30 AFM30 AC30C 1/4, 3/8, 1/2 AF40 AR40 AFM40 AC40C 3/4 AF40-06 AR40-06 AFM40-06 AC40C-06 AW + AFM 1/8, 1/4 AW20 AFM20 AC20D 1/4, 3/8 AW30 AFM30 AC30D 1/4, 3/8, 1/2 AW40 AFM40 AC40D 3/4 AW40-06 AFM40-06 AC40D-06 Table of Contents F.R.L.

SX

When ozone enters or is generated in the air supply. 2 4 2 4 2 4 Applicable solenoid valves: Series SX3 0, SX5 0, SX7 0 3 5 7 20 40 X90 SX Model no. Entry is the same as standard products.

Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

CA2

4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4

0.4

7 (14) 11 (20) D side 2 6 6 (12) 10 (16) 3 5 5 (10) 9 (12) 4 4 (8) 8 (8) 5 3 (4) 4 (4) Note) The max. number of mounted valves applies to double wiring.

Proposals for Energy Saving

Model VP3145 VPA3145 IN, OUT Port size Rc VP3165 VPA3165 VP3185 VPA3185 1 2 1 1/4 1 1/4 1 1/4 1 1/2 3/8 1/2 3/4 3/4 3/4 Easy conversion to N.C. or N.O.

Modular F.R.L. Units

AF30-A 1/4, 3/8 Bracket (Except AF10-A) AF40-A 1/4, 3/8, 1/2 5 Float type auto drain AF40-06-A 3/4 AF50-A 3/4, 1 AF60-A 1 Pages 43 to 54 Mist Separator AFM Series AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 AFM40-A 1/4, 3/8, 1/2 Float type auto drain AFM40-06-A 3/4 Pages 55 to 63 Micro Mist Separator AFD Series AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 AFD40-A 1/4, 3/8, 1/2 Float type

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

0.4

(Not applicable to Gateway unit) VQ7 Connector type manifold Connector wiring diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

CV/MVGQ

8, 12, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 90 100 110 120 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8,

CV/MVGQ

8, 12, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 100 110 120 90 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8,

CL

60 70 80 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 106.5 125.5 139.5 CLAG40SCLA40, #4 (#1+#4+#11) CLAG50SCLA50, #4 (#1+#4+#11) CLAG63SCLA63, #4 (#1+#4+#11) CLAG80SCLA80, #4 (#1+#4+#11) CLAG100SCLA100, #4 (#1+#4+#11) Single Clevis/CLAC (mm) Stroke range (mm) Bore (mm) CX GB BP BQ C GC J CD GD AL D GL A E GR B F H1 BN GA B1