Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ZHPmmmD-mmS 17 39.1 M10 depth 10 ZHPmmmE-mmS 27.45 21.8 6.75 12.7 5/16-18UNC ZHPmmmF-mmS 29.43 26.82 8.33 14.28 3/8-16UNC ZHPmmmG-mmS 12.7 41.7 5/16-18UNC depth 11 ZHPmmmH-mmS 14.28 44.1 3/8-16UNC depth 11 EXH.

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

α PneuAlpha HARDWARE MANUAL

Protection IP 20 Certications CE, UL/cUL Certications TV (AL-10MT-D, AL-10MR-D) Description Specication UL 508 EN60730-1 EN61010-1 EN50081-1 EN50082-1 EN50082-2 10 3.

PSxx-OMH0002CN

10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -() JIS B 8433-1993: 2) : : : 1 2 3 1 2 3 4 -2No.PS-OMH0002CN-D / / / / 1 1.5 3) 3) 1 1 () -3No.PS-OMH0002CN-D () () () () -4No.PS-OMH0002CN-D () * (ISE70 ) SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80

Information

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

Ｍ agnet Gripper Unit for Collaborative Robots

Parts description of Magnet gripper .5 3. Product Specifications .6 3-1. How to order .6 3-2. Specifications .7 3-3. Gripping force .8 3-4. Dimensions .10 3-5. Connector and pin layout . 11 3-6. Center of gravity .12 4.Product Specifications .13 4-1.Magnet Gripper .13 4-2. 3-port solenoid valve .14 4-3.

Magnet Gripper Unit for Collaborative Robots

Doc.No.MH*-OMY0017-A PRODUCT NAME Magnet Gripper Unit for Collaborative Robots MODEL / Series / Product Number MHM-25D-X7400A-TM Contents Safety Instructions .2 1.List of included items .4 2.Parts description of the magnet gripper .5 3.Product Specifications .6 3-1. How to order .6 3-2. Specifications .7 3-3. Gripping force .8 3-4. Dimensions .10 3-5. Connector and pin layout . 11 3-6.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

VK300

) VQD 78.4 70.9 VQD-V 4.5 7.5 44.5 R P VK VK 20 VT (Piping port) 3 x Rc 1/8 13.5 13 (Piping port) 3 x Rc 1/8 34 Refer to grommet type for other dimensions. 1413 A VK300 Series Type 20 Manifold/Body Ported (Top ported) VV3K3-20Stations n1 = Number of VK300 Grommet: G DIN terminal: D 2 x 4.5 (Mounting hole) Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 68.8 Max.10 78.4 70.9 (

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

60

75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

•

ASP with PHot Check Valve enes How to Order ASP S;:30F 0,1 ,0615 t .. , I .""~" Pilot ch".J Body size e diameter size '3: 1/8 standard Applicable tube outsid Millimeter size Inch 06 07 01/4" I 06 '~ 1/4 standard 5 3/8 standard 6 1/2 standard 08 08 05/16" .09 I 10 010 ~1 1 * 03/8' L12 " 012 1211/2" ;~ Type I 3 I Untversal Port size . +' ) PH otport 4' ; ~Y!l1bOl Cylir!

VVXA21/22

10 stations Manifold base Manifold type Nil V Common SUP Individual pressure LQ VVXA21 VVXA22 VXA21 -00 Applicable valve Symbol 3 1 LVN VXA22 -00 3 1 Port size (Individual port) 1 2 Rc Rc 1 8 1 4 TI/ TIL All common ports are Rc 3/8 Common SUP model has the indication of P and individual SUP has the indication of VAC. at the common port.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

ZQ-OM01601

JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - () () () () 4 - () * 100 JIS B 8392-1 1.1.21.6.2:2003 5 - * FG 100 m/ s2 ,() 6 - *() 6 33 () () 10m DC(-)() * ( ) () CE CE , 550 7 - * ON, , 1015 10 1% 1745 1 ,OFF 4 OFF * 8 - ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) [kPa] A -100 to 100 NPN 1 + B PNP 1

0.01

Note 3) This means that the element does not break at 0.5 MPa.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

Copper-free Actuators

Series M(D)HR Standard MHR2 2.3-1 SMH03 Nominal size 10, 15 MDHR2 With auto switch Rotary Actuator Size (Torque) Name of CAD file Series Application Page in Vol.3 Standard Copperfree 1 3 7 10 20 30 50 70 100 200 Series/Variation Rotary table Series MSU Standard MSU 1.7-1 SMSUl MDSU With auto switch Rotary table Series MSQ MSQ Standard 1.6-1 SMSQl MSQ With auto switch MSQR With shock absorber