Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

1

G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11

MQQ

0.5 M4 x 0.7 7 35 + Stroke 35 + Stroke 7 Standard type: MQQT CC 40 + Stroke 8.5 13 to 17 M5 x 0.8 M6 x 1 45 + Stroke 9 RB 7.5 50 + Stroke 8 to 11 M3 x 0.5 65 + Stroke M4 x 0.7 7 J Anti-lateral load type: MQQL (Built-in ball bushing type) 70 + Stroke 5.5 80 + Stroke 8 13 to 17 M5 x 0.8 M6 x 1 D6.5 85 + Stroke 105 + Stroke 7 -X : Stroke 20Data 10-5-11 11 Series MQQ Dimensions Basic style (Through-hole

MGQ

For details, refer to page 8-30-32. 8-20-11

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(The selection should allow a sufficient margin because the value calculated by the selection software involves an error with reference to the actual value.) m3max m1max m2max Weight kg MY340 20 30 40 50 Collision deceleration G 1500 N 10 5 4 3 2 1 40 30 20 10 5 4 3 2 1 m3 max m1 max m2 max Weight kg 8-14-11 11 Series MY3A/3B Model Selection 2 Calculation of Guide Load Factor 1.

Compact Cylinder

Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123 1.0 12 50 127 137 147 157 167 177 187

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

Peltier-type Chiller Thermo-con/ Compact Type

Power Supply Cable. p. 11 Dustproof Filter. p. 11 Specific Product Precautions. . p. 12 4 HEF Series Cooling Capacity Calculation Air-cooled Example When cooling the object below a certain temperature in certain period of time.

Rotary Table

Additionally, note that the 12 VDC relay does not apply to the auto switch. -12- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

IDX-OM-W094

R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-

MQQ

0.5 7 35 + Stroke M4 x 0.7 7 35 + Stroke Standard type: MQQT CC 40 + Stroke 8.5 13 to 17 M5 x 0.8 M6 x 1 45 + Stroke 9 RB 7.5 50 + Stroke 8 to 11 7 65 + Stroke M3 x 0.5 M4 x 0.7 J Anti-lateral load type: MQQL (Built-in ball bushing type) 70 + Stroke 5.5 80 + Stroke 8 13 to 17 M5 x 0.8 M6 x 1 D6.5 85 + Stroke 7 105 + Stroke -X : Stroke 20Data 10-5-11 11 Series MQQ Dimensions Basic style (Through-hole

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

CE

B H NTJ-015A NT-02 NT-04 NT-05 M5 x 0.8 7.8 9.2 12 8 4 H B M8 x 1.25 12.5 15.0 20 13 5 M14 x 1.5 21.0 25.4 32, 40 22 8 M18 x 1.5 26 31.2 50, 63 27 11 Electrical Wiring Input/Output The input/output of the scale cylinder is performed by a 7 shielded twisted pair wire from the sensor section plus a connector.

CRQ2

) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

29 D9h9 0 0.036 2-4.2 209.6 4.7 32 1 4.7 3 2-3 10 (35) 8 15.5 13.4 2 2 8 0.05 0 3 0 0.02 3 0 0.02 Open: 16 Closed: 10 Dimensional Differences between MHR and MDHR Regardless of auto switch installation, some body dimensions are different. 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) A 12 12 B A 5 4.7 B 14.5 14.5 15.5 15.5 Model -10R -10E -10R -10E MHR2 MDHR2 4 4 4 4 12-5-11

ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.)

MHY2/MHW2

D-Y7 W (V) 5 6 A B D-Y 9 Red light at ON Green light at ON Red light at ON Green light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 6 15 5 11 4 5 11 4 9 2 4 9 3 7 2 3 6 2 5 2 3 5 2 4 2.8-24

MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

MRQ

11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer