Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.
DA N4odels wi function at 10%oitheir maximum rated enerS/ percyce.lilessthan 10%, a snia ler modelshoud bespecned. 2. Prov de a positile stop 3nm before end of stroke in tension and cgr.pression to prevent nternal bottoming. 3.
(mm) Model M1 M2 L1 L2 L3 L4 H (Width across flats) D W (g) ZP2V-A5ZP2V-A8ZP2V-A01ZP2V-AG1ZP2V-AN1ZP2V-B5ZP2V-B6ZP2V-B01ZP2V-BG1ZP2V-BN1Tightening torque (Nm) Note) M5 x 0.8 M8 x 1.25 R1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 Rc1/8 G1/8 NPT1/8 1.0 to 1.5 5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8
Note 1) M5 size Note 2) Brass parts are all electroless nickel plated. Model Applicable tubing O.D. Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.
8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4
Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.
Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.
4.5 7 142 144 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16
Add 10 g for conduit type, 30 g for DIN terminal type, and 60 g for conduit terminal type respectively. Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 0.61 4.5 15 3 8 (10A) 1.1 6 26 8 1.6 38 1.0 10 2.2 53 1 2 (15A) 10 2.2 53 Note) Weight of grommet type.
ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit
10 12 Only R is available.
B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.
) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.
Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.
Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.
M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid
Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.
(mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size (mm) Pad (ZPT02 to 50-B4 to 10) Cylinder 4 6 8 10 13 16 20 25 32 40 50 Rod dia. (mm) Model Thread dia. Bore size (mm) 2 Model Note) 10 16 20 25 32 10 ZCUKC ZCUKQ ZCDUKC ZCDUKQ M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 ZCUKD ZCUKR ZCDUKD ZCDUKR 16 20 25 32 U R Note) When using ZC(D)UK 10, use ZP02 to 08U-X11. Pad shape is flat only.
Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.
49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50