ZSE2/ISE2

SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP 18 32 ISA2 58 52 10.2 IS PV 6.5 ZSM 8 V 10 PF2 10 17.6 5.5 Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 2-3.3 Mounting hole IF Data Connector type: ZSE2-0X-15C Indicator light (Red) 20 L

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) Elbow type TMH 6 8 10 12 Tube swivels 360 AS121F-M5-W2 M5 ASD Application to inch size tubing Metric size 6, 8, 10, 12 AS221F-01-W2 R1/8 AS221F-02-W2 R1/4 AS AS321F-02-W2 R1/4 Maximum operating pressure 1 MPa max.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

JA/JAH/JB/JS

Nominal thread size Applicable bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-125 14-150 18-150 Mounting Warning 1. For the screw-in depth of the female threads, refer to the dimensions (page 10-19-14). 2.

JA/JAH/JB/JS

Nominal thread size Applicable bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-125 14-150 18-150 Mounting Warning 1. For the screw-in depth of the female threads, refer to the dimensions (page 10-19-14). 2.

REC

9 10 D8 10 9 10 D-B5/B64 13 13 14 14 D-B59W -X 4 4 4.5 5 D-H7/H7W/ D-H7NF/H7BAL HS HS HS HS HS 20 2024.5 27 62 72 27.5 7 8.5 9 10 D-H7C 25 27 29.5 64.5 74.5 30 8 9 9 9 D-A3/D-A44 9 10 9 10 Data 4 4 4.5 5 D-G39/D-K39 D-G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

10 71.5 59 68 Applicable cord O.D. 4 to 6.5 Pg.7 29 mPm 27 50.5 58 63 25 2-3.5 (mounting holes) Manual override (non-locking) 27 0.5 0.5 P R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model ASR ASQ AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 18 35.5 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

REC

Stroke RR ZZ+Stroke (mm) A AL B1 CD CX D E F G H H1 I K L MM N NA Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

VK300

68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

JIS Standard Hydraulic Cylinder

8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F

CE

x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.