E-MY2B_E_A

11(20)kg 4(5)kg 8(10)kg 2.5(2.5)kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position 0.01mm Both ends Repeated Positioning stopping precision Intermediate stopping position 0.1mm Nominal size:16 10N Allowable external resistance NOTE 2) 20N Nominal size:25 Intermediate stopping

CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

XLF Series

50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

KA

KAU23-M5 38 9.6 15.5 34.5 9 M5 X 0.8 M6 X 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 9.6 1 8 KAU23-M6 KAU23-U01 11 39.5 KAU04-M5 4 M5 X 0.8 M6 X 1.0 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 42.5 KAU06-M5 M5 X 0.8 M6 X 1.0 39 2.2 2.2 12 KAU06-M6 43 13 17 12.8 1 8 3 8 KAU06-U03 46 45 43.5 39.5 17 14 12.8 KAU06-U01 13 6 1 4 39 KAU06-U02

Rotary Gripper Series MRHQ

closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides) 10 3-3H9 long groove depth 3 + 0.025

High-precision Digital Pressure Switch

((Refer to page 58) ((Refer to page 27) (Refer to page 23) (Refer to page 25) : The outputs will continue to operate during setting. : If a button operation is not performed for 30 seconds during the setting, the display will flash.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

DICOM 1 Failure Note 3) 9 ALM RA1 N OPC 2 12 MBR RA2 Electromagnetic brake interlock 13 DOCOM S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B phase pulse detector (Differential line driver) 18 LBR X INP 10 19 LZ Z phase pulse detector (Differential line driver) 20 LZR X Control common RD 11 14 LG X OP 21

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

14 25 MHKL2-12 11 12 DMHKL2-16 14 16 Long stroke type Series MHKL2 MHKL2-20 18 20 MHKL2-25 22 25 521 Wedge Cam Operation Slide Guide Air Gripper/2-Finger Type Series MHK2 12, 16, 20, 25 How to Order MHK 2 20 D 1 F M9B Standard type MHKL 2 20 D 1 F M9B Long stroke type Number of fingers Made to Order Refer to page 523 for details. 2 fingers 2 Bore size Number of auto switches 12 16 20 25

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

JXCx-OMY0006

Trigger LV (7, 11) 1% Word10: Pushing speed Description Word Bit Signal name Input range Min. unit 10 0-15 Pushing speed (7, 11) 1 mm/s Word 11: Moving force Description Word Bit Signal name Input range Min. unit 11 0-15 Moving force (7, 11) 1% Word12, 13: AREA 1 Description Word Bit Signal name Input range Min. unit 12 0-15 AREA 1 (Lower digits) Basic parameter "Stroke (-)" "Stroke (+)"

F

47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1 AS2001F 11.8 14.5 4 8.9 43.8 5.2 32.6 27.6 11.4 17 13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3 17

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Center pusher assembly Through hole MHSH3 Dust cover Spring type Pushing out work piece with external cylinder Cylinder type Air blowing 2 Finger Air Gripper Parallel Type Series MHS2 16, 20, 25, 32, 40, 50, 63 How to Order Cylinder Bore Size MHS 2 D 20 16 to 25 F9N Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Auto switch type Nil Without auto switch (built-in

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 Stroke reading cylinder Series CE1 Series CEP1 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC Note) Detection

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 Stroke reading cylinder Series CE1 Series CEP1 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC Note) Detection

AIR COMBINATION

28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20B-A 1/8 83.2 87.6 23.5 41.6 25 23.4 30 24 33 5.5 12 3.5 29 1/81/4 1/43/8 AC25B-A 1/8 110.2 115.1 23.5 30 55.1 35 30.5 41 35 7 14 4 41 AC30B-A 1/8 110.2 115.1 27 30 55.1 35 30.5 41 35 7 14 4 41 1/43/8 AC40B-A 1/8 145.2 147.1 33.5 38.4 72.6 40 36.1 50 40 9 18 5 48 1/43/81/2 AC40B-06-A 1/8 155.2 149.1 33.5 38.4 77.6 40 39.6 50 40 9 18 5 48 3/4 Optional

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

H 2.3 2.3-25