VG342

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Passage symbol 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz External pilot Nil VT N.C. (Normally closed) A N.O.

CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Series SY100 3 Port Solenoid Valve Rubber Seal

For manifold type 30, 31 VP Standard SY1 3 5 L 1 M3 VG : Body ported (Cv: 0.008) VP Standard SY1 4 M 5 1 (Cv: 0.008): Base mounted VQ 3 port Piping port Rated voltage VQZ For DC M3: With sub-plate : Without sub-plate 5 6 V S R 24V DC 12V DC 6V DC 5V DC 3V DC VZ VS Sub-plate style For manifold type S41 For AC (50/60Hz) 1 2 3 4 100V AC 200V AC (With gasket and screw) 110V AC [115V AC] 220V

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for Wireless Base 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for Wireless Remote 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

76

Air flow capacity (scfm [ANR]) Model Applicable air Note) Port size Power supply voltage (Frequency) compressor (kW) 50 Hz 60 Hz IDU3E Rc3/8 2.2 13.1 11.3 IDU4E Rc1/2 3.7 20.1 18.4 Single-phase 100/200 VAC, 230 VAC (50 Hz) IDU6E 5.5 29.0 26.5 IDU8E Rc3/4 7.5 42.4 38.8 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDU11E 11 60.0 53.0 IDU15E1 Rc1 15 98.9 91.8 IDU22E R1 22 151.8 137.7 Single-phase

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

operating pressure Ambient and fluid temperature 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

operating pressure Ambient and fluid temperature 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700

Air Cylinder NCM Series Stainless Steel Cylinders

Borc size %.%.1%s,1%.1lz . Action/Double acting only HOWTO ORDER Boot lleterbl %'%'114a Er.) NCDIIB 07$04(Xlil ior, "r*"*n"nf capattlity Rod Booi J-Nylon K-Neoprene DIilENStOt{S ! 7 Series NCM Piwt Bracket Rear Pivot Mount NCMC NC$-PCo75 31".%'..1%a".11/i' Pirsot Bracket (End Mount NCME) Series NCM Foot Bracket Rod Cleuis Jam Nut noart,reaat

PFA/PFW

34 4-4.5 40 50 (41.5) 3 4 1 2 73 Connector pin numbers Pin name Pin No.

A

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.

AR20-B to AR60-B

T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

ZSE30/ISE30

Then finish off by wiping with a dry cloth afterwards. 11 Series ZSE30/ISE30 Specific Product Precautions Be sure to read before handling. Refer to pages 9 through 11 for safety instructions and pressure switch precautions. Handling Mounting Warning Caution 1. Mounting with panel mount adapter 1. Do not drop, bump, or apply excessive impacts (980m/s) while handling.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27