Clean series 13/22-MXQ ; Bore size (mm): 6, 8, 12, 16, 20, 25 ; Standard or symetric styles ; Adjuster options: rubber stopper, metal stopper ; Auto switch capable

NARM Series

If it does not lock easily, turn the handle slightly clockwise or counterclockwise before pushing it. 1 3 22 15 43.5 72.5 101.5 130.5 159.5 Supply pressure (psig) 4 NARM3000 36.3 Secondary pressure (psig) 30 22 15 43.5 72.5 101.5 130.5 159.5 Supply pressure (psig) 145 Return to Menu NARM Series Specialty Regulators Regulator for Manifold NARM2500, 3000 Construction Main Parts Component Parts

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

Clean series 13/22-MXQ ; Bore size (mm): 6, 8, 12, 16, 20, 25 ; Standard or symetric styles ; Adjuster options: rubber stopper, metal stopper ; Auto switch capable

Check Valve Series AK 1

16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

Speed Controller with Uni One-touch Fitting AS Series

17 18.5 21 22 21 22 12 KE 15.0 AS-FG 17.2 17 1 4 18.5 39.4 34.4 32.0 26.6 AS-FP 19 AS-FM 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 AS-D AS-T 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 ASP 1 2 28.6 24 22.4 54.6 47.1 44.5 37.0 ASN Note 1) Reference dimensions Note 2) Reference dimensions of Uni thread after installation.

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" Easy installation and removal AS1001F 6, 10, 16, 20 AS2001F 20, 25, 32 Installment of hexagon nuts on panel nuts up and down in two locations enables user to mount or remove it depending upon the situation.

D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" Easy installation and removal AS1001F 6, 10, 16, 20 AS2001F 20, 25, 32 Installment of hexagon nuts on panel nuts up and down in two locations enables user to mount or remove it depending upon the situation.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

S Couplers

O-ring T IDK 345 KKA Series Dimensions/Plug (P) With check valve Male thread type (mm) Body size H Width across flats T Connection port size Weight g Effective area mm2 L1 Min. bore size A Model L2 KKA3P-01M R 1/8 15.4 31.4 35.4 14 -02M 1/8 R 1/4 16.0 5.6 17.4 19.8 32.4 38.4 -03M R 3/8 32.9 32.9 39.4 KKA4P-02M 17 R 1/4 28.3 36.2 42.2 -03M 1/4 R 3/8 18.9 6.9 26.4 36.6 36.7 43.2 T A -04M 22

Air cooled Thermo-con (Compact type)

History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Record of Changes Version Contents Date 1.0 First edition Jul/7/22 HEF002-A6 i Preface Preface Thank you very much for purchasing SMC Thermo-con. This manual contains description for communication protocol of this product for your full benefit from this product.

ZQ-OM01601

,ONOFF ON-OFF ON (22 -) "digit" 0 () SI ONOFF ON 12 - ON (22 -) (OUT1) "" 22 5R.D.(5) () "()" () F () 13 - ,FG 14 - NPN NPN 2 26.4V 80mA 2 V NPN (ZQ1-LW6-N-A) PNP PNP 2 80 mA2 V PNP (ZQ1-LW6-P-A) 15 - 133 1 1 1 1 16 - OUT1 (P_1),ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2 OUT2ON (P_1)OFF ((P_1)(H_2)),ON ONOFF H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Swivels

For -20 Ports, -24 Body is used.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

MXH

40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22(24.5) D-A9 D-M9 D-F9W MX MTS W ( ): Denotes the values of D-A93.