Bowls on size 30 or more are now covered with a transparent bowl guard, completely protecting them from the environment, and making the inside visible from 360 degrees.

CATALOG

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

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MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG Courtesy of Steven

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M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

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Rear plate A W U A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AB V AP Y + Stroke Z + Stroke WH (Max.)

Air Slide Table

A stroke B-A stroke 15 25 35 45 Adjuster options Symbol Adjuster type23 Adjuster mounting position1 5 Extension stroke end Retraction stroke end Extension stroke end Retraction stroke end Z Without adjuster ZA Metal stopper with bumper V V ZB V ZC V ZD Rubber stopper V V ZE V ZF V ZG Shock absorber/RJ V V ZH V ZJ V ZK Metal stopper V V ZL V ZM V ZBF Metal stopper with bumper Body option 10

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Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

A

www.stevenengineering.com I 1.38 LINEAR ACTUATOR: AIR CYLINDER SERIES NCG D I M E N S I O N S F R O N T N O S E M O U N T T Y P E NC(D)GNN_-_ A N D NC(D)GNA_-_ (B O R E S I Z E 20 A N D 25) D I M E N S I O N S F R O N T N O S E M O U N T T Y P E NC(D)GNN_-_ A N D NC(D)GNA_-_ (B O R E S I Z E 32, 40, 50 A N D 63) MAX STD EN KK LB MM P V W WT Y ZB STROKE A BN D EE NN BORE SIZE +0.0002 -0.0030

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VCR is a registered trademark of Swagelok Marketing Co. Ripple A small AC voltage superimposed on top of DC voltage. In the case of Fig. (3), ripple 10% means V' V" V'/V x 100 = 10% When no pulsation has occurred, ripple is 0%.

Smooth Cylinder/Low Speed Cylinder

Order auto switch mounting brackets separately when D-A9(V)/M9(V)/M9W(V)/M9A(V) types are mounted with a rail.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Electric Actuator/Slider Type

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Conrm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

15

(Allen-Bradley) MP-/VPMP/VP V TL TLY-A V V AM AM30 V V Beckhoff Automation GmbH AM AM31 V V AM AM80/AM81 V V Siemens AG 1FK7 1FK7 V V Delta Electronics, Inc.

CV/MVGQ

5 V, 12 V Relay, PLC Yes 12 V 3-wire (NPN) 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire 3-wire (NPN) With timer Grommet 5 V, 12 V IC circuit With diagnostic output (2-color indication) 4-wire (NPN) Lead wire length symbols: 0.5 mNil 3 m L 5 m Z Solid state switches marked with are produced upon receipt of order.

CV/MVGQ

Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) IC circuit 5 V, 12 V Grommet 12 V 2-wire Connector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) Grommet 2-wire 12 V With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V Lead wire length symbols: 0.5 mNil 3 m L 5 m Z None