High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 Applicable tubing size (inch) Fitting type Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B Symbol E T P U F Type Union elbow Union tee Panel mount union Union Union flange Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke

CQS

auto switch A 45.5 46.5 61 67.5 Without auto switch A 40.5 41.5 51 57.5 Bore size (mm) Stroke range (mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Cylinder with Lock

2 (Different surfaces) 10 n 10 + 30 (n 2) D-A9l 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-A9lV 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(Except 50 and 63) M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 b C H B Applicable bore size (mm) 6, 10 d M10 x 1.0 H 4 B 14 C 16.2 Part no. SNJ-016B 8-15-31 31 Magnetically Coupled Rodless Cylinder Direct Mount Type Series CY1R 6, 10, 50, 63 How to Order CY1R 25 H 300 Y7BW Number of auto switches Direct mount type Nil 2 pcs. S 1 pc. n n pcs.

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

LEC-OM02904

: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Stainless steel is used for size 10 only. 97 Series CRBU2WU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type CRBU2WU10, 15, 20, 30-S 2 x S2 2 x S1 2 x S1 2 x S1 Free mounting rotary actuator A port B port 2 x R Angle adjuster Cap Figures above show actuators for 90 and 180 when B port is pressurized,and they show size 20 actuators.

ZP3

across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.

High Purity Fluoropolymer

Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2

VQ7-6/7-8

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

Integrated Controller

EQY16HA Horizontal/Lead 10 Vertical/Lead 10 20 18 16 14 12 10 8 6 4 2 0 200 100 400 300 500 600 700 800 3.5 3000 mm/s2 3000 mm/s2 3 Work load: W [kg] Work load: W [kg] 2.5 2 5000 mm/s2 1.5 10 mm/s2 1 0.5 0 100 200 300 400 500 600 700 800 900 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY16HB Horizontal/Lead 5 Vertical/Lead 5 7 28 26 24 22 20 18 16 14 12 10 8 6 4 2 0 50 100 150 200 250 300 350 400

CQS

D-F9N D-A9l, D-F9lWV B P D-A9lV D-F9lV D-F9BA No. of auto switches 20* 15* 10 10 5 25* 2 15* 20* 10* 25* 5 5 1 * Consult SMC for shorter stroke lengths than indicated in the table.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

60534-1:2005 IEC 60534-2-3:1997 JIS B 2005-1:2012 JIS B 2005-2-3:2004 Equipment: JIS B 8471, 8472, 8473 Cv Process fluid control equipment 2.

Series VQ Base Mounted Metal Seal/Rubber Seal

Sl unit output No. 0 1 2 3 4 5 6 7 8 9 A B A B A Void A Void A B A B A B B A A A SY Double Double Double Double Double Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Double wiring (Standard) Single/Double mixed wiring (Option) SX VK SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VZ ADDRESS NO.

NCQ8

2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 #6-32UNC1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4 1/2 5 5-1/2 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4