10

0.3 to 1 RB series M8 x 1.0 RB0806(C) RB1006(C) M10 x 1.0 Basic type RB1007(C) P.895 to Stopper nut 0.05 to 5 RB1411(C) M14 x 1.5 RB1412(C) RB2015(C) M20 x 1.5 M27 x 1.5 RB2725(C) RBL1006(C) RBL series Coolant resistant type Basic type M10 x 1.0 RBL1007(C) RBL1411(C) P.906 to 0.05 to 5 M14 x 1.5 RBL1412(C) RBL2015(C) M20 x 1.5 M27 x 1.5 M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 RBL2725

SFOD-OMT0005CN

(6) Ry (2 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V OFF -28- (3)((2)) DC24V M24V EMG () 0V DC24V Ry (1 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (2 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (3 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (1)DC24V M24V EMG

LECA6_C

B RESET PLC 15ms30ms 2(P.40) 49 - +JOG 1-052 B RESET +1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) 1 [] A [a ] C RESET 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESETS VON (1) D 50 - ON (M24V) 1-145 RESETS VON (1) D 1-146 RESETS VON (1) D (C24V) RESETS VON (1) 1-147

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

MHK2

MHK2-20S MHK2-20C 80 60 70 Gripping force (N) Gripping force (N) 50 60 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 40 Model Allowable moment Allowable Moment Pressure 0.6 MPa 40 0.5 MPa 30 0.5 MPa 30 (Nm) 0.4 MPa 0.4 MPa 20 20 MHK2-12S/C 0.05 0.3 MPa 0.3 MPa 0.3 MPa 10 MHK2-16S/C 0.12 10 MHK2-20S/C 0.25 0 0 20 40 60 80 20 40 60 80 MHK2-25S/C 0.49 Gripping point L (mm) Gripping point

MHK2

MHK2-20S MHK2-20C 80 60 70 Gripping force (N) Gripping force (N) 50 60 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 40 Model Allowable moment Allowable Moment Pressure 0.6 MPa 40 0.5 MPa 30 0.5 MPa 30 (Nm) 0.4 MPa 0.4 MPa 20 20 MHK2-12S/C 0.05 0.3 MPa 0.3 MPa 0.3 MPa 10 MHK2-16S/C 0.12 10 MHK2-20S/C 0.25 0 0 20 40 60 80 20 40 60 80 MHK2-25S/C 0.49 Gripping point L (mm) Gripping point

CS1

32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90 115 18.5 20 46 226 182 17 60 50 48 44 63 25 74 39 40 100 M45 X 1.5 M24 X 1.5 63 to 1200 140 23 25 56 110 277 225 67 60 60 20 55 71 30 86 49 50 126 M56 X 2 1 M30 X 1.5 80 to 1200 65 140 23 30 130 330 270 80 76 37 70 96 60 20 49 68 63 160

VQ7-6/7-8

50 68.5 76.5 145 86.5 155 50 50 68.5 13 (port B) 13 (port A) 13 (port B) 13 (port A) Manual override Manual override B A B A B B 38 50 62 38 50 62 Indicator light R1 P R2 R1 R2 Indicator light 2-6.5 Mounting hole 2-6.5 Mounting hole 42.5 42.5 42.5 42.5 G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 125.5 137.5 125.5 137.5 37 93 37 93 25 (port X) 25 (port X) 5 3 3 5 22 22 14 14 1 1 2-Rc3/8

AZ1000

Diaphragm Nozzle Seat 316L SS Electropolish + Passivation 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 0.00 0.03 0.07 0.10 0.14 0.17 0.21 0.24 0.28 0.31 0.34 0.38 0.41 0.45 0.48 0.52 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Delivery pressure (MPa) Delivery pressure (psig) 316L SS PCTFE (Option: Vespel, PTFE) PCTFE (Option: PTFE) Dimensions inch (mm) AZ1000 2.12 (53.8) Max. 5.0 (127.0

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

125

/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

High Purity Fluoropolymer

CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Slider Type Ball Screw Drive/11-LEFS Series

0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

Compact Guide Cylinder

(40 x 2), 63 (45 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view 2 x P (Plug) WA + Stroke/2 Z 4 x MM depth ML L 4 x OA through 4 x OB counterbore depth OL (OL) 4 x NN through 2 x P (Plug) U X PW H VA PE T R 2 x P D GB GA S Q 2 x P (Plug) JC K J PD FB FA C + Stroke A + Stroke G [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 50 (40 x 2) 25, 50, 100

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Same side 75 90 100 110 90+50 (n4) 2 n=4, 8, 12, 16, 100+50 (n4) 2 n=4, 8, 12, 16, 110+50(n4) 2 n=4, 8, 12, 16, 20+50(n2) Dif. sides Additional Weight of Lock (kg) D-B59W n=2, 4, 6, 8, n (n2) 2 40 50 63 80 100 Bore size (mm) 75+50 n=2, 3, 4, 90+50(n2) n=2, 4, 6, 8, 100+50(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8 , Same side Rear end lock (H) 0.02 0.03 0.03 0.10 0.12 Manual release

Soft Start-up Valve AV2000/3000/4000/5000 1

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The