MLGC ) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38 8.5 15.5 14.5 11.5 ( ): Denotes the values of long strokes. 9-4-9 10 Series MLGC Operating Range Auto switch model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W
the values of long strokes. 9-4-9 10 Series MLGC Operating Range Auto switch model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline
Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.
[F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.
Applicable Auto Switches Bore size Applicable auto switch Electrical entry (Function) Page (mm) D-B5/B6 D-B7/B8 D-B73C/B80C D-C7/C8 D-C73C/C80C D-B59W D-G5/K5 D-G5NTL D-G7/K7 D-K79C D-H7 D-H7C D-G5lW/K59W D-G5BAL D-G59F D-H7lW D-H7BAL D-H7lF 5.3-10 Grommet Grommet Reed switch Connector CL 5.3-9 Grommet 5.3-11 Connector MLGC 20 Grommet (Indication with 2 color) 5.3-25 Grommet 5.3-30 CNA
50 75 100 Non-locking type Front lock CBQ2 Rubber bumper 32, 40, 50, 63 Rear lock Locking type Series CBQ2 How to Order B 50 D C 32 H L CBQ2 Standard A93 S B 50 D C CDBQ2 With Auto Switch 32 H L Number of auto switches With auto switch (built-in magnet) 2 pcs. 1 pc.
Auto Switches/Proper Mounting Position at Stroke End Detection B A (mm) D-A9, D-A9V (mm) D-M9, D-M9V (mm) D-F9W, D-F9WV A A A B B B Operating range Operating range Operating range Nominal size 16 25 Nominal size 16 25 Nominal size 16 25 3 44 116 48 112 48 112 8 8.5 3.5 54 156 58 152 58 152 Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators switch
Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature
Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9
C D Can be mounted 2 ways Improves ease of mounting the unit. A B Table running accuracy (mm) The LG1 series provides a stainless steel frame (LG1TH) for customers who required rigidity with an extendable aluminum frame. Refer to page 41 for further details.
D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9 D-M9V L (mm) D-M9 D-M9W D-M9V D-M9WV D-M9A D-M9AV MHY2-10D 3 1 5 3 MHY2-16D 3 1 5 3 MHY2-20D 3 1 MHY2-25D 1 ) 11 8. 1 2 ON ON 1 1),2)1 A 2 B 1),2) C 1 1 12 2) 3) 4) 0.30.5mm 2) 0.30.5mm 0.30.5mm 0.30.5mm 13 2-4. 1.
Union Tee: KPT 3-Applicable tubing D Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS D D 10.4 20.7 4.5 18 4 4 7 KPT04-00 4 12.8 22.8 5.3 19.5 10 10 9 KPT06-00 6 15.2 26.3 6 21.5 26 18 16 KPT08-00 8 4.2 8 18.5 29.4 6.8 24 41 29 25 KPT10-00 10 M M 20.9 31.4 7.5 25 58 46 29 KPT12-00 12 L L Note 1) D indicates the maximum diameter.
Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H
hole: G1/2 LQ LVN Manual override (Non-locking) TI/ TIL Pilot port PA PAX PB Main port Main port Rc Pilot port Rc A B C D E F H J K L Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 17-4-25 6 Series VNC Flange Type Port size: 32F, 40F, 50F Electrical entry hole
Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.
d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/
(100) D 6.3 (CN2SW)ON (EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC)OFF (LEC)(EMG+,EMG-) 22 - (LEC) ()LEC6 DC24V 0V Ry EMG+ Ry EMG(1 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 23 - 7.CN3 1 1 DA CC-Link A 2 2 DB CC-Link B 3 3 DG CC-Link 4 4 SLD CC-Link
Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.
Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12