Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

Short Stroke Electric Actuator Series LX

(B contact) Operating temperature range Work load Speed Positioning repeatability C kg Performance to 100 Note 2) mm/s 0.05 mm 5 phase stepper motor (without brake) Ball screw 8mm, 6mm lead Direct acting guide Motor Lead screw Guide Main parts Note 1) When mounting a work piece to the actuator's end plate, its weight should be within the value inside ( ).

JXCx-OMU0024

For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

SFOD-OMT0012

For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

Air Fittings & Tubing

E B C D A 7 8 2.1 5.5 7.1 7.7 6.5 8.5 19.5 20.5 8.5 9.5 1.8 3 M-01H-4 M-01H-6 SM3A, #12/#13 2.1-49 Miniature Fittings Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective area (mm2) 2.1 4.0 Part No. C B A 1.8 2.5 5 8 12 14 M-5AN-4 M-5AN-6 SM5B, #1/#2 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Ionizer Gun

150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance

Uniaxial Electric Actuator Series LJ1

500 100 200 300 500 Figure 1.

Rotary Actuator/Vane Style Series CRB1

J Z Y K S T X CRA1 Key Key CRQ2 D D D D D MSQ C C C MSZ CRQ2X MSQX MRQ C D D Key (mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

Clean Gas Filter

(Refer to page 300.)

MB1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

I/O Configurator (NFC version)

Information tab The Information tab consists of (A) Unit information, (B) System Configuration and (C) Description. (A) (B) (C) (A) Unit information The Unit information area indicates the unit information. Module information NFC access Description Content Energized Not energized Part No.

I/O Configurator (NFC version)

Information tab The Information tab consists of (A) Unit information, (B) System Configuration and (C) Description. (A) (B) (C) (A) Unit information The Unit information area indicates the unit information. Module information NFC access Description Content Energized Not energized Part No.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Dd9 L d l m t -0.030 -0.040 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 10 5 16.6 4.8 12.2 1.5 0.7 C type 5 for shaft 16 8 21 7.6 16.2 1.5 0.9 C type 8 for shaft 20 10 25.6 9.6 20.2 1.55 1.15 C type 10 for shaft 25, 30 10 41.6 9.6 36.2 1.55 1.15 C type 10 for shaft 40 14 50.6 13.4 44.2 2.05 1.15 C type 14 for shaft 9

Stability of suction position,

Suction Verification C.

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

A B C Reserve D E F n: Start address -46No.EX-OMW1003-A Channel diagnosis Input register Bit No. Diagnostic content 07 Reserve 8 The analogue value has fallen below the user set value. 9 The analogue value has exceeded the user set value. A Reserve RWr(n+2) Unit No.0 RWr(n+5) Unit No.1 B Reserve : C The ON/OFF counter has exceeded the set value.

I/O Configurator (NFC version)

Information tab The Information tab consists of (A) Unit information, (B) System Configuration and (C) Description. (A) (B) (C) (A) Unit information The Unit information area indicates the unit information. Module information NFC access Description Content Energized Not energized Part No.

Digital Pressure Switch

: 0 to 50 C, Storage: -10 to 60 C (no condensation or freezing) Ambient humidity range Operation, Storage: 35 to 85%RH (no condensation) Withstand voltage 1000 VAC, 1 minute between terminals and housing Insulation resistance 50 M or more at 500 VDC between terminals and housing Temperature characteristics 2%F.S. (25 C reference) Oil resistant vinyl cabtyre cable 3 cores 3.5, 2 m 4 cores