Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

. : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48 1.1 33 1.6 t: Rotation time (s) 71 71 54 71 71 1.5 54 2.2 74 107 86 74 78 2.4 78 2.9 Rotary actuator 137 166 197 137 137 4.0 147 4.8 197 233 398 197 363 5.3 196 6.4 296 378 517 296 451 9.7 314 12.0 296 476 12.0 333 493

CC

80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116

Refrigerated Air Dryers

Valve closed Lifting position Valve open 45 or more 45 or more 45 IDF/IDU Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for Safety Instructions.

energy saving effect

3000 m Circulating fluid Note 1), 2) Tap water, 15 to 40% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity Note 3), 9) kW 10.5 15.7 20.5 25 28 Heating capacity Note 4) kW 2.5 3 5.5 7.5 Temperature stability Note 5) C 0.1 Rated flow (Outlet) L/min 45 (0.43 MPa) 45 (0.45 MPa) 125 (0.5 MPa) Maximum flow rate L/min 120 130 180 Maximum

HRX-OM-S004

5.19.1 Alarm buzzer sound setting . 5-45 5.19.2 Setting/checking of alarm buzzer sound . 5-45 5.20 Alarm customizing function . 5-46 5.20.1 Alarm customizing function . 5-46 5.20.2 Setting and checking of the alarm customizing function . 5-50 5.20.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-63 HRS Series HRX-OM-S004 Contents 5.21 Communication function

rep-modular-e

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

High Vacuum Angle Valve, XL Series

80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber

Vacuum System Peripherals:

5 45 45 45 M5 x 0.8 ZX 1 8 1 4 , , , , 1 4 3 8 1 4 3 8 1 2 ZR 3 4 3 4 , 1 1 ZM Inlet pressure 0.7 MPa, Pressure drop 0.05 MPa ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

CNA

105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 140 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 120 + 65 n = 4, 8, 12, 16 15 + 65 n = 2, 4, 6, 8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke

CNA

105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 140 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 120 + 65 n = 4, 8, 12, 16 15 + 65 n = 2, 4, 6, 8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke

HRX-OM-M090

Fig 9.4-7 Cooling capacity (HRS018-A-20-G) 3) HRS024-A-20-G 3500 3500 Ambient Ambient temperature temperature 3000 3000 Cooling capacity[W] Cooling capacity[W] 25 25 2500 2500 32 32 2000 2000 40 40 45 45 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Cooling capacity is reduced by 300W if option

Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

A

90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

MGP

Bore size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Notes 113 102 90 79 68 57 45 34 23 113 OUT 6 12 Switch mounting bracket Hexagon socket head cap screw (M2.5 x 0.45 x 8l ) 2 pcs. Hexagon socket head cap screw (M3 x 0.5 x 16l ) 2 pcs.

PF2A/PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Output specifications Pin no. 1 2 3 4 Pin description DC (+) NC/Analog output DC () OUT A 42 Pulse output only 62 52 Pulse output + Analog output 72 Flow direction 16-11-23 20 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.