MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

REC

42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front flange: F 182 167 148 118 0.3 Foot: L L 1 140 128 114 90

CJ5-S

18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90

C76

+0.036 0 12 +0.043 0 0 0.033 9 30 38 32 40 M30 x 1.5 G 1/8 30 38 11 M8 x 1 34.5 58 7 38 23.8 17(19) 47 10 34.5 184 68 17 15.3 M10 x 1.5 0 0.039 M38 x 1.5 G 1/4 35 50 13 M10 x 1 42.5 8 69 45 28.3 22(25) 57 12 42.5 227 89 19 12 20 M12 x 1.75 ( ) : In the case of air cushion With rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90

MU

8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 H 14 14 15 18 21 ZZ 83 86 90

LG1H

Applicable strokes: 450, 550, 650, 750, 850, 950 Example) LG1H2021PC-550-F2-X2 500 8.5 13.3 600 9.3 14.5 700 10.1 15.8 800 10.9 17.1 900 11.7 18.3 1000 12.5 19.6 mm kg kg Standard stroke Aluminum Stainless steel Body weight Operating temperature range 5 to 40 (with no condensation) 30 90 C kg N mm/s mm Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning

Dedicated Controller

90 256 1 for L5 255 1 for L3 General purpose input no., State AND input time out subroutine call command C-AND (P-no.) label General purpose input no., State OR input time out subroutine call command C-OR (P-no.) label General purpose input no., State AND input condition jump command J-AND (P-no.) label Condition jump General purpose input no., State OR input condition jump command J-OR

Wireless System

Description 73.6 1 24 V (for output) 56.6 2 1 2 0 V (for output) 3 24 V (for control/input) 5 30.2 4 0 V (for control/input) 4 3 13.2 5 FE EX600-ED3 42.5 5.5 26 20.5 8 106 90 30.35 Power supply connector PWR: 7/8 inch 5-pin plug 56.6 Configuration Pin no.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

348 20 285.5 303 325 335.5 19 274 291.5 312.5 323 18 262.5 280 300 310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113 130.5 150 160.5 4 101.5 119 150 160.5 3 90

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

PFxx-OMJ0005CN

10% PFM710 80% 20% 0.27.0 L/min 0.27.4 L/min 07.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.525.0 L/min 0.526.3 L/min 026.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.520.0 L/min 0.521.0 L/min 021.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60%

PFxx-OMS0001CN

.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A M3

PF-OMN0009_C

-2No.PF-OMN0009CN-F / 1 1.5 3 3)1 1 () [] -3No.PF-OMN0009CN-F () () () () -4No.PF-OMN0009CN-F () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (), (0~90 )3mPas(3cP)(0~90 ) () <> -5No.PF-OMN0009CN-F * 16 FG (49 N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMN0009CN-F * () 6 33 () () 10 m DC(-)() -7No.PF-OMN0009CN-F * ( ) () CE -8No.PF-OMN0009CN-F * 3 * -9No.PF-OMN0009CN-F

AXTS-OMY0007

Insert the flat blade driver to the groove until it contacts the bottom of the groove and turn the driver 90 degrees. Rotating direction does not matter. Do the same for release (push and rotate for 90 degrees). Tighten the piping using the correct torque shown below.

CEx-OMI0064

10W 20VA 10W AC : AC1500V,1 : AC500V,1 AC :DC500V,50M 0 +50() 35 85%RH() (1s) 2000V,600V 1055Hz 0.75mm X,Y,Z 2 10G X,Y,Z 350g *1) CEU5 ,8 <> *2) 100kHz <>,, 7 - CEU5 90 A /B 90 100kHz ,A /B A +12V 10% A B +12V 10% B B C D A E F G H A : 2.5 sec E : 5 sec B : 2.5 sec F : 5 sec C : 2.5 sec G : 5 sec D : 2.5 sec H : 5 sec UPDOWN UP ,,DOWN , 100kHz ,UP.DOWN UP +12V

LEKF-OMZ0035

Max acceleration/deceleration [mm/s2] Positioning repeatability [mm] 0.01 Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw (LEKFS)Ball screw + Belt (LEKFSR/L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor output [W]/size [mm] 100W/40

Electric Slide Table / High Precision Type 《 AC servo motor 》

(For with lock) (10)I/O cable length * [m] Without cable Nil Without cable (Connector only) H 1 1.5 -7- 1.2.2 Specification LESYH*(D,R,L)*V Motor type V6/V7 Model LESYH16*V6 LESYH25R/LV7 LESYH25DV7 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N](Set value: 45 to 90%) *1 65 to 131 127 to 255 79 to 157 154

LEH_C

/LEHZ 2.1 LEHZ () 2.1.1 LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 /(mm) 4 6 10 14 22 30 (mm) 251/73 249/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28

MU

side flange style CQ2 RQ MU D-X 20Data ZZ + Stroke (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Single clevis style Double clevis style Single clevis style Double clevis style Q + Stroke (mm) Z + Stroke Rotation range () 100 90

Series CE1

As a result, a 90 phase difference pulse signal of 0.1mm/pulse (Signal 2) is output. r By measuring this pulse signal with the counter, it is possible to detect the piston position with a resolution of 0.1mm. 4.4-4 Series CE/Precautions Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instructions, and actuator and auto switch precautions.