Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

Large blow and

E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45

100

Circuit diagram 90 With vacuum pressure switch With pressure gauge Refer to the vacuum port figure above for the branch specification. 90 Air pressure supply (1/P) port applicable tubing O.D. (2000) 68.6 A Release button color ZL6mm 8 Light gray ZL6mNm 5/16" Orange Vacuum (2/V) port1 Rc3/4, G3/45, NPT3/4 (Recommended tightening torque: 28 to 30 Nm) 2 x R20 Air pressure supply (1/P) port

ZSE30A(F)/ISE30A

.: ZS-38-A1) 25 20 20 45 30 2 30 34.6 19 5.2 14.7 9.6 5.2 Bracket configuration allows mounting in four orientations.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

AMF

Air Flow (page 14-20-45).

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

IDUS/IDFS

(C) 30 35 40 45 50 15 15 15 15 15 10 10 10 10 10 5 5 5 5 5 1.71 1.37 1.09 0.89 0.75 1.31 1.05 0.84 0.68 0.58 0.92 0.74 0.59 0.48 0.40 30 1.63 1.30 1.04 0.85 0.72 1.25 1.00 0.83 0.65 0.55 0.88 0.70 0.46 0.46 0.39 32 1.56 1.25 1.00 0.81 0.69 1.20 0.96 0.77 0.62 0.53 0.84 0.67 0.37 0.44 0.37 35 1.46 1.17 0.94 0.76 0.64 1.13 0.90 0.72 0.59 0.50 0.79 0.63 0.28 0.41 0.35 40 Data C: Correction Factor

CRQ2

S: Upper 90 Lower 180 11-8-6 7 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Size 20/30/40 TF effective depth TL TA TB 45 BE CA CA CRB2 CRBU2 BU CRB1 MSU 8JJ (Opposite side 4 locations) 2-J through (Opposite side JA counterbore depth JB) BD B CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

switch: MDSUA3-S CRB2 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99/S99V/S9P/S9PV/T99/T99V CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 15.5 45

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

16 Stroke fine adjusting range (mm) Type MLU Side support A MY-S25A MY-S25B MY-S32A MY-S32B MY-S40A MY-S40B RB1412 RB2015 RB2015 Shock absorber model Side support B 58.8 58.8 19.6 Max. absorbing energy (J) ML1C For details about dimensions, etc., refer to page 9-14-9. 15 15 12 Stroke absorption (mm) D1000 1000 1000 Max. collision speed (mm/s) Auto Switch Mounting Bracket Part No. 25 25 45

RLQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Extension locking LOCK PC PC Rod side cylinder port Rear cylinder port PL unlocking port M8 x 1.25 (Effective thread depth) 18.5 55 Unlocks when pressurized 22.5 2-5.4 through 2 x 2-9 counterbore depth 7 9 7.5 60 6.5 16 45 27 48.1 2-Cushion needle Dust

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

MXH

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45

10-cna2w-e

. #8, #9, $2, $4 Rod seal B NBR MBW80-PS 41 $2 43 $4 45 Release piston seal NBR MBW100-PS 40, 41, 43 and 45 to 48 are non-replaceable parts, so they are not included in the seal kit. Cushion seal Urethane Since the lock of the CNA2 series cannot be disassembled and is normally replaced as a unit, kits are for the cylinder section only.

Digital Gap Checker

Even if the orifice is clogged with foreign matter, By removing the setting dial for S3, variations in the product construction enables cleaning with the detection distance are prevented. the internal orifice removed. 1: Except F type 2 3-Color Display Digital Gap Checker ISA3 Series Compact & Lightweight Volume: 40% reduction 63 38 45 Weight: 55% reduction (Comparison between the ISA3-GC

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

.: ZS-31-B) 5000 (38.6) Brown 45 2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No. Description Lead wire color Note 1 DC(+) Brown 12 to 24 VDC Blue (30.8) 2 OUT2 White Switch output 2 24.55 Black 3 DC() Blue 0 V 4 OUT1 Black Switch output 1 When used as an IO-Link device 15 No.

25

1 6 10.5 2 x R3.3 10 61 (7.5) Auto balance sensor [High accuracy type]/IZS31-DG 2 x 3.4 2 x 3.4 Amplifier Head 3500 1500 0.2 0.2 20 4.8 6.6 4.8 69 95 23 78 98 14.5 5 8.8 7.8 10.2 10.2 13 Sensor 60 7.7 71 12 1 6 14 2 x Counterbore 6.6, Depth 5.7 (Height of thread bearing surface 8.8) 433 IZS40/41/42 Series Dimensions Power supply cable IZS40-CP 6 Terminal semi-stripped 3.8 4 1 14.6 52 L 45