Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: A93 (A93--Reed, DC Volt, AC Volt, LED, Horizontal), Lead Wire: L (3m), Number of Switches, Mounting Position: A (2 pcs, Valve Open/Closed)
51 However, please contact SMC for water-resistant products of 20 and 25. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.
B64 M9NW Relay PLC Yes 3-wire (NPN) F59W Diagnostic indication (2-color indicator) 5 V, 12 V IC circuit M9PW 3-wire (PNP) F5PW M9BW 24 V 2-wire 12 V Grommet J59W M9NA1 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V M9PA1 Water resistant (2-color indicator) M9BA1 2-wire 12 V F5BA1 F59F 4-wire (NPN) IC circuit IC circuit IC circuit 5 V, 12 V Diagnostic output (2-color indicator) A96 A93
Terminal conduit M9NW 3-wire (NPN) Relay PLC Yes G59W 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit M9PW 3-wire (PNP) G5PW 24 V M9BW 2-wire 12 V K59W Grommet M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Water resistant (2-color indicator) 12 V 2-wire G5BA G59F F59F 4-wire (NPN) 5 V, 12 V IC circuit IC circuit Diagnostic output (2-color indicator) A96 A93
Lead wire length (m) Load voltage 5 (Z) Applicable load Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 1 (M) 3 (L) AC DC 12 V In-line A93 M9N M9B Reed auto switch 24 V 2-wire 100 V 12 V Relay, PLC Grommet Yes 3-wire (NPN) Solid state auto switch 24 V Relay, PLC Grommet Yes 12 V 2-wire Lead wire length symbols
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.
A96V A96 5 V Grommet Yes 12 V A93V A93 100 V 24 V Relay, PLC 2-wire 3-wire (NPN) M9NV M9N IC circuit 5 V, 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V F9NWV F9NW Grommet 3-wire (NPN) Relay, PLC 5 V, 12 V 24 V Yes Diagnostic indication (2-color display) IC circuit 3-wire (PNP) F9PWV F9PW F9BWV F9BW Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible
function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161
D-A93 120 M9// 25H4 14 XL-OMY0002
9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002
10. 10-1. 2 2P5P6 16 XL-OMY0002
10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O
Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93
(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV
Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.
IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 Relay, PLC 100 V 2-wire 12 V A90V IC circuit No 100 V or less 1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 2 1 m type lead wire is only applicable to D-A93. Auto switches marked with a are produced upon receipt of orders.
A90 A90V No Reed switch Solid state switch 2-wire 24V A93 A93V Grommet 100V 12V Yes 3-wire (NPN equiv.) IC circuit 5V A96 A96V Mounting bracket part nos.
Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.
Nil (Example) A93 3m . L (Example) A93L 5m .
Nil (Example) A93 3m . L (Example) A93L 5m. Z (Example) F9NWZ Note) Solid state switches marked "" are produced upon receipt of order. Note) For cylinders with auto switches, the switches (already attached to mounting brackets) are packed together with the cylinder for shipment, but are not mounted on the cylinder.
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M