Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

IIIIIII

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Air Pilot Operated

Parl No. naq. 1A MB aO20.03 tg Ba &2041 1C MB 4@1-03 lD MB12-O3 121 Manlfold Block #.{1 Mrnlfold Slock *23 Manlfold Block ,28 Manltold Block l{ol} Us lor mountlno NVS ln24 valvs.

Title not found

0.2913 M 0.2950 7.5mm 0.2953 19/64 0.2969 7.6mm 0.2992 N 0.3020 7.7mm 0.3031 7.75mm 0.3051 7.8mm 0.3071 7.9mm 0.3110 5/16 0.3125 8mm 0.3150 O 0.3160 8.1mm 0.3189 8.2mm 0.3228 P 0.3230 8.25mm 0.3248 8.3mm 0.3268 21/64 0.3281 8.4mm 0.3307 Q 0.3320 8.5mm 0.3346 8.6mm 0.3386 R 0.3390 8.7mm 0.3425 11/32 0.3438 8.75mm 0.3445 8.8mm 0.3465 S 0.3480 8.9mm 0.3504 9mm 0.3543 T 0.3580 9.1mm 0.3583 23

Electro-Pneumatic Proportional Valve

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

17

23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48 Stroke adjustment range by Intermediate fixing spacer (mm) MY1 W Stroke adjustment range is applicable for one side when mounted on a cylinder.

NARM Series

Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Standard Specifications 4 Ways of Connection Fluid Air Proof pressure psig (MPa) 175 (1.2) Max. operating pressure psig (MPa) 120 (0.8) Set pressure range psig (MPa) 7~100 (0.05 to 0.7) Ambient and fluid temperature 23~140F (5 to 60C) (No freezing) Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief

Title not found

0.2913 M 0.2950 7.5mm 0.2953 19/64 0.2969 7.6mm 0.2992 N 0.3020 7.7mm 0.3031 7.75mm 0.3051 7.8mm 0.3071 7.9mm 0.3110 5/16 0.3125 8mm 0.3150 O 0.3160 8.1mm 0.3189 8.2mm 0.3228 P 0.3230 8.25mm 0.3248 8.3mm 0.3268 21/64 0.3281 8.4mm 0.3307 Q 0.3320 8.5mm 0.3346 8.6mm 0.3386 R 0.3390 8.7mm 0.3425 11/32 0.3438 8.75mm 0.3445 8.8mm 0.3465 S 0.3480 8.9mm 0.3504 9mm 0.3543 T 0.3580 9.1mm 0.3583 23

VR4151/4152

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions D3 Metric size: Light gray Inch size: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing dia. d M1 L1 Metric size: Light gray Inch size: Orange Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 VR1210F-23 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 4 VR1210F-04 12.8 10.4 56 20.3 32.2 21.9 15.7 15.8 25.2

H/DL/L/LL

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

KJ

(mm) a b Effective area (mm2) Weight (g) D L M2 Model 3.2 4 KJH02-23 KJH02-04 8.4 9.3 26.6 26.6 8.8 8.8 12.7 12.7 0.9 0.9 2.4 3.2 2 M1 M2 D D L Applicable tubing a Applicable tubing b Male elbow: KJL T H A Applicable tubing O.D.

ISG

20 26 23 20 26 30 29 10 30 29 10 ISA2 77 77 99 99 IS 126 126 R 3/8 R 3/8 ZSM PF2 IF Dripproof type ISG210 to 291-030 (Without hysteresis scale plate) ISG210 to 231-031 (With hysteresis scale plate) Data Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure adjusting bolt Setting pressure adjusting bolt 75 18 8.5 110 56 175 110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20

AS-FG

AS1201FG-M5-23-X12 AQ Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASV Ex.) AS1201FG-M5-23-X214 AK Note) Throttle valve is only compatible with the part no. of the meter-out type.

AS-FM

AS1201FM-M5-23-X12 Ex.) AS1201FM-M5-23-X21 VCHC Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. ASR ASQ Throttle Valve (Without Check Valve) X214 Ex.) AS1201FM-M5-23-X214 Note) Throttle valve is only compatible with the part no. of the meter-out type.

AS-FG

AS1201FG-M5-23-X12 ASP Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASN Ex.) AS1201FG-M5-23-X214 AQ Note) Throttle valve is only compatible with the part no. of the meter-out type.

High Vacuum Slit Valve

In these figures, the slit valve closes an opening (slit) 23 which transfers workload and a gate (seal material ) does not clamp (seal) a seating face . In Figure 2A, the slit valve opens and makes the slit 23 able to transfer workload.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42 Flow Control Equipment Precautions Be sure to read before handling.

Modular Type Air Filters Series AF

fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20 40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23