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Ambient temperature range should be 14-140"F 1-10^60'C). Please contact SIVIC for cases other than this ranoe. e Load on Diston rod Pay special attention to the lact that the load of piston rod should always be aligned parallel with lhe cylinder axis.

IIIIIIIIII

/16 P85 = POLYSULFONE 1/8 PM = PANEL MOUNT FM = FLUSH MOUNT MM = MANIFOLD MOUNT PT = PIPE THREAD .1B = Gold Contacts For other special requirements contact factory 2 5 15 30 60 100 FM and PM models supplied with 1/16" barb standard Ex F-4300-60-PM = 60 PSI adj. range, panel mount with 1/16" barb Back to Top .

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-01-06 26.9 37.2 17 12.7 31.8 17.5 9.3 13.1 24.4 13.5 22.9 6 11.6 10.9 14 8.4 1/8" AS231F-01-03 AS231F-01-08 30.9 41.7 28.2 18.5 8 15.2 21 12.9 16.2 9.3 5/32" 24.9 18 12 (12.7) 17 (17.5) AS231F-01-05 AS231F-02-04 30.6 40.1 21.9 16 4 10.4 10.9 14 31.8 23.9 32 10.9 16.2 16.5 26.8 36.1 31.1 32.1 27.1 11.6 3/16" 14.2 1/8 AS231F-01-07 AS231F-02-06 34 42.6 16.2 37.2 25.6 25.2 17 6 12.8 19 33 12.9

PSE530/200

SET To measuring mode 16-3-14 14 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 3: Special Setting 1 Precision indicator setting Refer to A Display calibration function on page 16-3-17 for details. Calibration mode + SET MPa Measuring mode kPa Press and hold for 2 seconds or longer.

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

Prevents Micro-Bubbles

Note 1) (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

Transfer

15 19 O 69 84 102 P 41 56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15

Series PF2W Digital Flow Switch For Water

Note 5) This product conforms to the CE marking. 305 Series PF2W Flow Characteristics (Pressure Loss) PF2W704, 504 PF2W720, 520 PF2W740, 540 0.030 0.05 0.07 0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.05 0.020 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 0 Flow rate (L/

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

12 10 8 20-0.033 56.2 46.5 37.5 33.5 7 5.5 5.5 5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26.5 22 20 20 51 42.5 34.5 30 181 159 146 146 M26 x 1.5 M26 x 1.5 M20 x 1.5 247 217 204 200 1/8 40 32 25 20 24 22 22 18 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 32-0.039 0 8 10 M32 x 2 1011Axial foot (L): RECL G H G F Width across flats B2 A K 2 x P (Rc, NPT, G) NA AL F Width across flats B1 H1 2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA

EX500-DX_e

Safety cannot be assured in the case of unexpected malfunction. 0 2 4 6 8 10 Input No. 12 14 No corrosive gas or dust Operating atmosphere 250 g Weight 450 g Provide grounding to assure the safety and noise resistance of the Serial System. Individual grounding should be provided close to the product with a short cable. 138 Seal cap (for M8 connector socket): 16 pcs.

FGD-C

(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

IP80-OM00019

A (1)(IEC79)ExdBT5 A ExdBT5 A) 164 ) B) () (1.5) 4 P368010-32 7.010.0 P368010-33 10.112.0 16 14 7.

MHx-OMZ0005

No.MH*-OMZ0005 / / JMHZ2-16D-X7400B-(HC10/HC10DT)-(N/P) . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 JMHZ2-16D-X7400B-HC10 . 6 JMHZ2-16D-X7400B-HC10DT . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. . 10 JMHZ2-16D-X7400B-HC10-(*) . 10 JMHZ2-16D-X7400B-HC10DT-(*) . 11 3-6. . 12 3-7. . 13 JMHZ2-16D-X7400B-HC10-(*) . 13 JMHZ2-16D-X7400B-HC10DT-(*) . 13 4 . 14 4-1. . 14 4-2. 3 . 15 4-3. . 16 5. . 17 5-1