Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

LEC-OM02704CN

(1) 055() 0+40() -20+65() -15+70() 90RH() 80RH() 90RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) EMG ON(Ryn0)OFF ALM MBR (RYn0)OFF(ALM) (MBR) (EMG) EMG RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3)

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

SZ3000

SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 02 2 stations SUP/EXH block mounting position SUP/EXH block fitting specifications 20 D side (2 to 10 stations) 20 stations D U B M Nil L B Straight Elbow type (Upward) U side (2 to 10 stations) Elbow type (Downward

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Table of Contents

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

How to Order Non plug-in manifold 10-SS5Z3-60 U 05 Clean series CE-compliant Stations CE-compliant Nil Q 02 2 stations SUP/EXH block mounting position 20 D side (2 to 10 stations) 20 stations Option D U B M When a longer DIN rail is desired than the specified stations, specify the station number to be required.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For "R" and "U", DC voltage is only available.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

42

U-side end plate assembly part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

LEC-OM02904

( ) (1) (B1B2) B1 B1 DC24V DC24V U B DC24V U B DC24V VAR VAR B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 13.1.2 13 2 13.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

For type R and U, only DC voltage is available.

ARM10/11

AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 SMC SMC K K P P C C U U O O S S L L H H 260.5 53 285.5 33.5 18 323 OUT IN OUT IN IN 348 373 ARM11AC2-12-A Handle position: Bottom/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 52.5 5.3 39 14 3 5 5.5 SMC SMC

ARM10/11

AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 SMC SMC K K P P C C U U O O S S L L H H 260.5 53 285.5 33.5 18 323 OUT IN OUT IN IN 348 373 ARM11AC2-12-A Handle position: Bottom/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 52.5 5.3 39 14 3 5 5.5 SMC SMC

Table of Contents

F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No. VVQ1000-57A-3 2 pcs. per one 16 16 24 18 24 16 stations 16 stations 16 stations 14 14 8 Max. points When ordering DIN rail only Negative Common Specifications DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.

MG

5 u !4 !6 @5 @3 !9 w @7 !0 y !2 @5 !1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Series VQ Base Mounted Metal Seal/Rubber Seal

S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).